研究発表 - 中野 誠彦
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Comparison of net production rate between 100MHz and 13.56MHz in capacitively coupled plasma in Ar by 2D optical emission spectroscopy
Takeshi Kitajima, Mitsutaka Izawa,Nobuhiko Nakano, and Toshiaki Makabe
18th International Symposium on the Physics of Ionized Gases,
1996年09月,(2-6 Sep 1996, Kotor, Yugoslavia)
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Modeling of narrow gap reactive ion etcher by the relaxation continuum model
Nobuhiko Nakano, and Toshiaki Makabe
18th International Symposium on the Physics of Ionized Gases,
1996年09月,(2-6 Sep 1996, Kotor, Yugoslavia) Invited Physics of Ionized Gases, (1996)269-278
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Diagnostics of non-equilibrium inductively coupled plasmas in Argon
Akifumi Okigawa, Masahiro Tadokoro, Nobuhiko Nakano, and Toshiaki Makabe, Zoran Lj. Petrovi'c, and Akihiko Itoh
18th International Symposium on the Physics of Ionized Gases,,
1996年09月,(2-6 Sep 1996, Kotor, Yugoslavia)
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Time resolved -2D- optical emission spectroscopy in rf capacitively coupled plasma
Takeshi Kitajima, Mitsutaka Izawa,Nobuhiko Nakano, and Toshiaki Makabe
13th European Sectional Conference on the Atomic and Molecular Physics of Ionised Gases,
1996年08月,(27-30 Aug 1996, Poprad, Slovakia)
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A two dimensional modeling of parallel plate rf plasma in Ar
Nobuhiko Nakano, and Toshiaki Makabe
13th European Sectional Conference on the Atomic and Molecular Physics of Ionised Gases,
1996年08月,(27-30 Aug 1996, Poprad, Slovakia)
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Comparative study of the characteristics between CCP and ICP by 2D-modeling/ diagnostics
Toshiaki Makabe, and Nobuhiko Nakano
Electrochemical Society Proceedings,
1996年 -
2D-Spatiotemporal Structure of ICP Reactor
Kazuhiro Kamimura, Toshiaki Makabe, Nobuhiko Nakano, and Shinji Nakagami
IEEE International Conference on Plasma Science,
1995年06月,(5-8 June 1995, Madison, USA)
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Modeling of RF Glow Discharges by Direct Numerical Procedure of the Boltzmann Equation
Nobuhiko Nakano, and Toshiaki Makabe
IEEE International Conference on Plasma Science,
1995年06月,(5-8 June 1995, Madison, USA)
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A Spatiotemporal Structure of ICP Reactor in two-dimensional model
Kazuhiro Kamimura, Toshiaki Makabe, Shinji Nakagami, and Nobuhiko Nakano
187th Meeting of The Electrochemical Society,,
1995年05月,(21-26 May 1995, Reno, USA)
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Modeling of RF glow discharges in O2 by RCT model
Mari Shibata, Nobuhiko Nakano, and Toshiaki Makabe
The Third World Congress on Computational Mechanics (1-5 August 1994, Chiba, Japan)International Association for Computational Mechanics,
1994年08月 -
Modeling of RF glow discharges by direct numerical procedure of the Boltzmann equation using parallel computer
Nobuhiko Nakano, and Toshiaki Makabe
The Third World Congress on Computational Mechanics (1-5 August 1994, Chiba, Japan)International Association for Computational Mechanics,
1994年08月 -
Influence of stepwise ionization in Ar and N2 mixture in RF discharges at 13.56MHz
Fumiyoshi Tochikubo, Zoran Lj. Petrovi'c, Shigeru Kakuta, Nobuhiko Nakano, and Toshiaki Makabe
in Proceedings of the International Conference on Reactive Plasmas,
1994年01月,(19-21 January, Yokohama, Japan)Japan Society of Applied Physics, (1994)207-210
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Influence of driving frequency on RF glow discharges in electronegative gases
Nobuhiko Nakano, Zoran Lj. Petrovi'c, and Toshiaki Makabe
in Proceedings of the International Conference on Reactive Plasmas,
1994年01月,(19-21 January, Yokohama, Japan)Japan Society of Applied Physics, (1994)81-84
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Modeling of SF6 Narrow-Gap-RIE by RCT model
Nobuhiko Nakano, Naohiko Shimura, Zoran Lj. Petrovi'c, and Toshiaki Makabe
in Proceedings of SYMPOSIUM on DRY PROCESS,
1993年11月,(1-2 November 1993, Tokyo, Japan),The Institute of Electrical Engineers of Japan, (1993)5-10
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Modeling of RF Glow discharges in SF6 by RCT Model
Nobuhiko Nakano, Naohiko Shimura, Zoran Lj.Petrovi'c, and Toshiaki Makabe
45th Annual Gaseous Electronics Conference,
1992年10月,(22-25 October 1992, Boston, USA)
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Modeling and diagnostics of RF glow discharges in Ar
Toshiaki Makabe, Nobuhiko Nakano,Fumiyoshi Tochikubo, and Shigeru Kakuta
44th Annual Gaseous Electronics Conference,
1991年10月,(27-30 October 1991, New Mexico, USA)
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Numerical Analysis of RF Glow Discharges in HCl by RCT Model
Nobuhiko Nakano, Toshiaki Makabe,Naohiko Shimura
44th Annual Gaseous Electronics Conference,
1991年10月,(27-30 October 1991, New Mexico, USA)
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Modeling and optical diagnostics of reactive RF glow discharges in CH4 at 13.56MHz
Toshiaki Makabe, Nobuhiko Nakano,Akira Suzuki, Fumiyoshi Tochikubo, and Yukio Yamaguchi
43rd Annual Gaseous Electronics Conference,
1990年10月,(October 1990, Champaign-Urbana, Illinois)
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Modeling and optical diagnostics of RF glow discharges in CH4 at 13.56MHz
Toshiaki Makabe, Motoo Nishimura, and Nobuhiko Nakano
Europhysics Sectional Conference on Atomic and Molecular Physics of Ionized Gases,
1990年08月,(August 1990, Orleans)