研究発表 - 中野　誠彦

Two-D Emission profile of parallel plate RF plasma -Effect of driving frequency-

Takeshi Kitajima, Nobuhiko Nakano, and Toshiaki Makabe

50th Annual Gaseous Electronics Conference,, 

1997年10月

, 

(6-9 October 1997, Madison, USA)

Electron Transport to a Substrate in an rf Capacitively Coupled Plasma by the Boltzmann Equation

Jun Matsui, Nobuhiko Nakano, and Toshiaki Makabe

50th Annual Gaseous Electronics Conference,, 

1997年10月

, 

(6-9 October 1997, Madison, USA)

Two Dimensional Modeling of Ar RF ICP by RCT Model

Katsumi Iyanagi, Nobuhiko Nakano, and Toshiaki Makabe

50th Annual Gaseous Electronics Conference, 

1997年10月

, 

(6-9 October 1997, Madison, USA)

Two Dimensional Modeling of Two-Frequency-Operated-Plasma in Ar by Relaxation Continuum Model

Nobuhiko Nakano, and Toshiaki Makabe

American Vacuum Society 44th National Symposium, 

1997年10月

, 

(20-24 Oct 1997, San Jose, USA)

Solving 'Topographic Dependent Charging' by a Pulsed Plasma

Mari Shibata, Jun Matsui, Nobuhiko Nakano, and Toshiaki Makabe

American Vacuum Society 44th National Symposium, 

1997年10月

, 

(20-24 Oct 1997, San Jose, USA)

Phase-space modeling of electrons interacting with surface in reactive ion etcher

Toshiaki Makabe, Jun Matsui, and Nobuhiko Nakano

International symposium on plasma and flow simulation for materials processing, 

1997年07月

, 

(10-12 July 1997, Sendai, Japan)

Two dimensional modeling of a two frequency driven plasma in Ar

Nobuhiko Nakano, and Toshiaki Makabe

International symposium on plasma and flow simulation for materials processing, 

1997年07月

, 

(10-12 July 1997, Sendai, Japan)

Space- and Time- Resolved 3-D Profile of Inductively Coupled Plasma in O2

Masahiro Tadokoro, Nobuhiko Nakano, Zoran Lj. Petrovi'c, and Toshiaki Makabe

191st Meeting of The Electrochemical Society, 

1997年05月

, 

(4-9 May 1997, Montreal, Canada)

Electron transport to a substrate in an rf capacitively coupled plasma for etching by the Boltzmann Equation

Toshiaki Makabe, Jun Matsui,Nobuhiko Nakano

International Workshop on Basic Aspects of Nonequilibrium Plasmas Interacting with Surfaces, 

1997年01月

, 

(26-27 Jan 1997, Shirahama, Japan)

Two dimensional modeling of a capacitively coupled plasma by two frequency operation

Nobuhiko Nakano, Toshiaki Makabe, and Masayuki Hachiya

3rd international conference on reactive plasmas, 

1997年01月

, 

(21-24 Jan 1997, Nara, Japan)

Two dimensional modeling of high density inductively coupled plasma sources in Ar

Katsumi Iyanagi, Nobuhiko Nakano, and Toshiaki Makabe

3rd international conference on reactive plasmas, 

1997年01月

, 

(21-24 Jan 1997, Nara, Japan)

A 2D Dust particle distribution in CCP reactor

Ryuichi Hashido, Masao Hasebe, Yoshiyuki Hosokawa, Nobuhiko Nakano, Toshiaki Makabe, and Masayuki Hachiya

3rd international conference on reactive plasmas, 

1997年01月

, 

(21-24 Jan 1997, Nara, Japan)

2D optical emission spectroscopy in 100MHz capacitively couples plasma

Takeshi Kitajima, Nobuhiko Nakano, and Toshiaki Makabe

3rd international conference on reactive plasmas, 

1997年01月

, 

(21-24 Jan 1997, Nara, Japan)

Three dimensional optical emission tomography of an inductively couples plasma

Akifumi Okigawa, Nobuhiko Nakano, and Toshiaki Makabe

3rd international conference on reactive plasmas, 

1997年01月

, 

(21-24 Jan 1997, Nara, Japan)

'Modeling of narrow gap reactive ion etcher by the relaxation continuum model'

N.Nakano and T.Makabe

Physics of Ionized Gases, 

1996年12月

, 

口頭発表（招待・特別）

　概要を見る

狭ギャップSF6-RIE のモデリングをRCT モデルからシミュレートし、プラズマ構造と機能、ラジカル分布を論じている。

Influence of magnetic field on the structure in ICP(-Modeling and CT measurement-)

Toshiaki Makabe, Katsumi Iyanagi, Akifumi Okigawa, and Nobuhiko Nakano

49th Annual Gaseous Electronics Conference, 

1996年10月

, 

(20-24 October 1996, Argonne, USA)

A two dimensional modeling of capacitively coupled plasma reactor

Nobuhiko Nakano, and Toshiaki Makabe

American Vacuum Society 43rd National Symposium, 

1996年10月

, 

(14-18 Oct 1996, Philadelphia, USA)

Robot Assisted Three Dimensional Optical Emission Tomography of Inductively Coupled Plasma

Akifumi Okigawa, Masahiro Tadokoro,Nobuhiko Nakano, Akihiko Itoh , and Toshiaki Makabe

American Vacuum Society 43rd National Symposium, 

1996年10月

, 

(14-18 Oct 1996, Philadelphia, USA)

A two dimensional modeling of capacitively coupled plasma reactor

Nobuhiko Nakano, and Toshiaki Makabe

49th Annual Gaseous Electronics Conference, 

1996年10月

, 

(20-24 October 1996, Argonne, USA)

Three dimensional optical emission tomography of inductively coupled plasma in Ar

Akifumi Okigawa, Masahiro Tadokoro, Nobuhiko Nakano, and Toshiaki Makabe

49th Annual Gaseous Electronics Conference, 

1996年10月

, 

(20-24 October 1996, Argonne, USA)