総説・解説等 - 高橋　英俊

6-AXIS FORCE/TORQUE SENSOR FOR SPIKE PINS OF SPORTS SHOES

H. Ishido, H. Takahashi, A. Nakai, T. Takahata, K. Matsumoto, I. Shimoyama

2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015) （IEEE）  2015-February   257 - 260 2015年

ISSN  1084-6999

　概要を見る

This paper reports on a method to measure forces and torques acting on spike pins of sports shoes. We fabricated a 2 mm x 2 mm x 0.3 mm 6-axis force/torque sensor chip, which consists of 6 piezoresistive beams. From the resistance changes of the 6 beams, 6 components of forces and torques can be detected. The sensor chip was connected to a flexible printed circuit board (PCB) and covered with thin polydimethylsiloxane (PDMS). Then, the sensor chip and flexible PCB were embedded in spike-pin-shaped epoxy resin. We calibrated the spike-pin-shaped sensor, and confirmed that 6-axis forces and torques were able to be detected by the proposed sensor.

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A CANTILEVER WITH COMB STRUCTURE MODELED BY A BRISTLED WING OF THRIPS FOR SLIGHT AIR LEAK

H. Takahashi, A. Isozaki, K. Matsumoto, I. Shimoyama

2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015) （IEEE）  2015-February   706 - 709 2015年

ISSN  1084-6999

　概要を見る

This paper reports a cantilever with comb structure, inspired by a bristled wing of thrips which acts as a continuous membrane wing because of the effects of low Reynolds numbers. The comb structures are formed at the edges of the cantilever and its surrounding frame. When differential pressure is applied to the cantilever, both comb structures act as airflow suppression through the gap. The leakage of the fabricated comb cantilever was smaller than the normal cantilever due to the overlapping area of the combs, even the gap area was twice larger. The proposed structure will be utilized as a high sensitive barometric pressure change detector.

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サブミクロンギャップを有するMEMS可変メタマテリアルの製作と設計

磯崎瑛宏, 菅哲朗, 高橋英俊, 根本夏紀, 小西邦昭, 五神真, 松本潔, 下山勲, 神田夏輝

電気学会マイクロマシン・センサシステム研究会資料 MSS-14 （ 1-4.6-23 ） 71 - 75 2014年05月

3A1-K05 羽ばたき機を用いた8の字羽ばたき運動時の翼面圧力差計測(バイオミメティクス・バイオメカトロニクス)

風間 涼平, 高橋 英俊, 平川 真之介, 高畑 智之, 松本 潔, 下山 勲

ロボティクス・メカトロニクス講演会講演概要集 （一般社団法人 日本機械学会）  2014 （ 0 ） _3A1 - K05_1-_3A1-K05_4 2014年

　概要を見る

We measured the differential pressures of an ornithopter whose stroke trajectory was a figure of eight. Simultaneously, we visualized the flow around wing surface, and analyzed the differential pressures to connect it. To measure the pressure, we attached a MEMS differential pressure sensor on the wing surface. We designed the ornithopter which could operate a flapping motion and a lead-lag motion at the same time. The ornithopter worked by an electric motor and its flapping frequency was 6-8 Hz. The consequence of this experiment suggests that the peak of the differential pressures and the vortex around wing surface occuur at the same time during the flapping.

J0220203 アリの登攀時の床裏反力の計測([J022-02]生物規範メカニクス・システム:生物の運動、力学及びミメティクスセッション(2))

高橋 英俊, 松本 潔, 下山 勲

年次大会 （一般社団法人 日本機械学会）  2014 （ 0 ） _J0220203 - -_J0220203- 2014年

　概要を見る

This paper reports on measurement of ground reaction forces (GRFs) of ant legs during running on level ground, vertical wall and ceiling. Micro force plate array is designed and fabricated to measure anterior and vertical directional forces. Thus, GRF of all legs in the various ground angles can be detected simultaneously. The size and force resolution are 2000 μm × 1000 μm × 20 μm and 1 μN, respectively. The measurement results show that ants use different GRF distribution in three types of terrestrial locomotion. In every types of locomotion, the ant was affected by the gravity reaction force, which was totally equal to the body weight. The gravity reaction force was approximately equal to each leg during running on level ground and ceiling. The gravity reaction force during ceiling was thought to be generated by the adhesion force of sub-micron scale hairs on the tip of the legs. The measured GRF distribution clarified that ants use the different strategies of running mechanism depending on the angle of the ground against the horizon plane.

ヘルムホルツ共鳴器を並列に接続した平面形状の音響メタマテリアル

田村 洋人, 高橋 英俊, 高畑 智之, 松本 潔, 下山 勲

電気学会研究会資料. PHS, フィジカルセンサ研究会 2013 （ 20 ） 35 - 38 2013年08月

1A1-A12 翅脈の弾性が異なる羽ばたき機を用いた翼面圧力差計測(バイオミメティクス・バイオメカトロニクス(1))

平川 真之介, 高橋 英俊, 高畑 智之, 松本 潔, 下山 勲

ロボティクス・メカトロニクス講演会講演概要集 （一般社団法人日本機械学会）  2013   1A1 - A12(1)"-"1A1-A12(4)" 2013年05月

　概要を見る

We measured differential pressures on the wing of an ornithopter with different stiffness of veins in flapping motion. The pressure measurement was carried out by using a MEMS differential pressure sensor attached on the wing surface. The ornithopter was modeled after a hawkmoth. The wing length was 110 mm, and total mass was 7.3-7.7 g. We fabricated three types of wings which had veins of different cross-section. In the experiment, the ornithopter was propelled by an electric motor and flapped at 10-11 Hz. The result suggested that when a wing is flexible, the different pressure on the wing is small, but the passive deformation of the wing is large during takeoff, then the ornithopter can fly by being subjected to thrust during upstroke and lift during downstroke.

2P1-G09 インソールに配置したMEMS3軸力センサによる足裏応力分布計測(感覚・運動・計測(3))

中井 亮仁, 永野 顕法, 高橋 英俊, 松本 潔, 下山 勲

ロボティクス・メカトロニクス講演会講演概要集 （一般社団法人日本機械学会）  2013   2P1 - G09(1)"-"2P1-G09(2)" 2013年05月

　概要を見る

We proposed and demonstrated a wireless measurement system of 3-axis stress distribution at a human sole. The system consists of three 3-axis force sensors fabricated by MEMS (Micro Electro Mechanical Systems) technologies which were placed on the heel, thenar and hypothenar, three amplifier circuit boards and a CPU board with a Bluetooth module. The 3-axis stresses composed of normal stress of vertical direction and shear stresses of lateral and front-back directions were measured and calibrated for crosstalk compensation in level walk. The peak stresses of vertical, lateral and front-back directions are about 100kPa at the heel and thenar, 15kPa at the thenar and 20kPa at the heel, respectively.

MEMS3軸力センサを用いた階段昇降時の足裏応力分布計測

中井亮仁, 永野顕法, 高橋英俊, 松本潔, 下山勲

日本機械学会シンポジウム:スポーツ・アンド・ヒューマン・ダイナミクス(CD-ROM) 2013   ROMBUNNO.134 2013年

PZTカンチレバーを用いた高感度低消費電力の差圧センサ

海法克享, 高橋英俊, 富松大, 小林健, 松本潔, 下山勲, 伊藤寿浩, 前田龍太郎

センサ・マイクロマシンと応用システムシンポジウム(CD-ROM) 30th   ROMBUNNO.6PM3-PSS-38 2013年

AlN cantilever for differential pressure sensor

Yutaka Tomimatsu, Hidetoshi Takahashi, Takeshi Kobayashi, Kiyoshi Matsumoto, Isao Shimoyama, Toshihiro Itoh, Ryutaro Maeda

2013 IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRIC AND WORKSHOP ON THE PIEZORESPONSE FORCE MICROSCOPY (ISAF/PFM) （IEEE）     336 - 339 2013年

　概要を見る

The differential pressure sensors are used for various applications. In this work, a piezoelectric differential pressure sensor using an aluminum nitride (AIN) thin film cantilever is proposed to achieve high sensitivity and low power consumption. The dimensions of the cantilever are 1500 mu m x 1000 mu m x 2 mu m. The proposed sensor needs no power consumption in the AIN sensing element in principle. The sensor design was validated by measuring the performance of the sensor, which showed sensitivity of 8.2 mV/Pa from -20 Pa to 20 Pa

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107 素足歩行時に足にかかる力の計測(運動計測(2))

堀 正峻, 高橋 英俊, 中井 亮仁, 松本 潔, 下山 勲

シンポジウム: スポーツ・アンド・ヒューマン・ダイナミクス講演論文集 （一般社団法人日本機械学会）  2012   60 - 63 2012年11月

　概要を見る

We fabricated the 3-axis force sensor applicable to gait analysis. The 3-axis force sensor was fabricated by MEMS (Micro Electro Mechanical Systems) process. Its size was 8 mm x 8 mm * 5 mm and its weight was 0.6 g. The sensor was attached to the sole of the left foot. The sensor's size and weight were so small that it didn't interfere with human locomotion. Using this sensor, regional plantar 3-axis forces were measured during level walking on inside floor. From this measurement, peak values of forces experienced under third metatarsal were revealed; the peak value of vertical force was about 200N and that of antero-posterior shear force was about 90 N.

サイドウォールドーピングを用いた3軸触覚センサ

高橋英俊, 中井亮仁, 松本潔, 下山勲

センサ・マイクロマシンと応用システムシンポジウム(CD-ROM) 29th   ROMBUNNO.SP4-3 2012年10月

多足歩行ロボットの歩行時に足にかかる力の計測

堀正峻, 高橋英俊, 中井亮仁, 松本潔, 下山勲

日本ロボット学会学術講演会予稿集(CD-ROM) 30th   ROMBUNNO.3I1-2 2012年09月

CARBON DIOXIDE DETECTION BY SURFACE PLASMON RESONANCE WITH IONIC LIQUID

K. Ishizu, T. Kan, Y. Takei, H. Takahashi, K. Matsumoto, I. Shimoyama

2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) （IEEE）     784 - 787 2012年

ISSN  1084-6999

　概要を見る

We propose a carbon dioxide (CO2) gas sensor using an SPR (surface plasmon resonance) sensing scheme with an ionic liquid. In this study, we used [EMIM][BF4] as an ionic liquid. The permittivity of the liquid increased when it absorbs CO2 gas. This permittivity change was detected by the SPR sensing scheme. We confirmed that our proposed sensor was able to measure CO2 gas with a concentration as low as 700 ppm.

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Differential pressure measurement of an insect wing using a MEMS sensor

Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

2012 ICME International Conference on Complex Medical Engineering, CME 2012 Proceedings    349 - 352 2012年

　概要を見る

An insect can perform flight maneuvers such as hovering and snap turns. There have been many methods such as digital particle image velocimetry (DPIV) or kinematic analysis using robotic wings modeled on insects to investigate the aerodynamic force. The aerodynamic force is derived from the differential pressure between the upper and lower surfaces of its wings. The actual aerodynamic force on real insect wings has never been measured directly during free flight. Here we show direct measurement of differential pressure acting on the wing surface of a real insect during free flight. A micro differential pressure sensor was fabricated by utilizing micro electro mechanical systems (MEMS) and fixed to a butterfly (Papilio protenor) wing. The size and weight of the sensor chip are 1.0 mm x 1.0 mm x 0.3 mm and 0.7 mg, respectively. The differential pressures were measured during takeoff. From the measured differential pressure distribution, aerodynamic force was calculated. The maximum aerodynamic force generated on the wings was 3 times larger than the gravity acting on the body. © 2012 IEEE.

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サイドウォールドーピングを用いたピエゾ抵抗型三軸力センサ

菅哲朗, 高橋英俊, 青山雄一郎, 竹井裕介, 野田堅太郎, 松本潔, 下山勲

センサ・マイクロマシンと応用システムシンポジウム(CD-ROM) 28th   ROMBUNNO.P4-3 2011年09月

G020034 チョウの離陸時における圧力差分布([G02003]バイオエンジニアリング部門一般セッション(3))

高橋 英俊, 松本 潔, 下山 勲

年次大会 : Mechanical Engineering Congress, Japan （一般社団法人日本機械学会）  2011   "G020034 - 1"-"G020034-3" 2011年09月

　概要を見る

This paper reports on direct measurement of differential pressure distribution on a butterfly wing during takeoff. Differential pressure was measured with a micro-fabricated sensor. A MEMS (Micro Electro Mechanical Systems) piezo-resistive cantilever was used as the differential pressure sensor. The sensor chip was 1.0 mm x 1.0 mm x 0.3 mm in size and 0.7 mg in weight. The sensor was attached to a butterfly (Papilio protenor) wing surface through a Cu/Polyimide substrate and Au wires. The total weight was 30 mg so that it did not interfere with flight condition. The distribution of five points to the spanwise direction at the forewing and one point at the center of the hindwing was measured during takeoff. As a result, it was clarified that the maximum differential pressure was 20 Pa on the forewing tip. Additionally, the maximum aerodynamic force generated on the wing was 3 times larger than the gravity acting on the body.

MICRO SUCTION CUP ARRAY FOR WET/DRY ADHESION

N. Thanh-Vinh, H. Takahashi, T. Kan, K. Noda, K. Matsumoto, I. Shimoyama

2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) （IEEE）     284 - 287 2011年

ISSN  1084-6999

　概要を見る

We propose a micro suction cup array for adhesion to both dry and wet surfaces. We measured the peel-off forces of a PDMS micro suction cup array, a PDMS flat-tip micro structure array and a flat PDMS pad from both wet and dry glass surfaces. When the glass surface was wet, the peel-off forces of a PDMS flat-tip micro pattern and a flat PDMS pad decreased by more than 1.7 times and 7.0 times, respectively. On the other hand, peel-off forces of a PDMS micro suction cup array increased by over 1.1 times when the glass surface was wet. Also, in both wet and dry conditions, an array of PDMS micro suction cup adhered stronger to a glass surface than a PDMS flat-tip micro pattern and a flat PDMS pad. Furthermore, we demonstrated that the adhesion of a suction cup array can be enhanced by miniaturizing the size of the cups.

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J0205-1-1 チョウ翼面における圧力差計測([J0205-1]バイオメカニズム/バイオミメティクス/バイオインスパイアー(1))

高橋 英俊, 松本 潔, 下山 勲

年次大会講演論文集 : JSME annual meeting （一般社団法人日本機械学会）  2010 （ 6 ） 27 - 28 2010年09月

　概要を見る

This paper reports on direct measurement of differential pressure on a butterfly wing during free flight. Differential pressure was measured using a micro-fabricated sensor. A piezo-resistive cantilever was used as a differential pressure sensor. The sensor was 1.0 mm × 1.0 mm × 0.3 mm in size and 0.7 mg in weight so that it did not interfere with wing motion. By attaching the sensor to the center of a butterfly forewing with a flexible wiring, the differential pressure on the wing was measured during free flight. We revealed that the maximum pressure value was 11.7 Pa at the end of stroke. The maximum aerodynamic force in free-flight is 10 times as large as the gravity acting on the body.

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