研究者詳細 - 高橋　英俊

総説・解説等 - 高橋　英俊

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MEMS力センサを用いた心筋細胞の拍動計測

池上怜汰, 塚越拓哉, 松平謙英, 平山佳代子, 高橋英俊, NGUYEN Thanh-Vinh, 玉本拓巳, LI Fengyu, 野田堅太郎, 小柳健一, 大島徹, 下山勲

電子情報通信学会技術研究報告(Web) 122 （ 152(ED2022 17-23) ） 2022年

ISSN 2432-6380

Experimental study of the aerodynamic interaction between the forewing and hindwing of a beetle-type ornithopter

Hidetoshi Takahashi, Kosuke Abe, Tomoyuki Takahata, Isao Shimoyama

Aerospace （MDPI） 5 （ 3 ） 2018年09月

© 2018 by the authors. Beetles have attracted attention from researchers due to their unique combination of a passively flapping forewing and an actively flapping hindwing during flight. Because the wing loads of beetles are larger than the wing loads of other insects, the mechanism of beetle flight is potentially useful for modeling a small aircraft with a large weight. In this paper, we present a beetle-type ornithopter in which the wings are geometrically and kinematically modeled after an actual beetle. Furthermore, the forewing is designed to be changeable between no-wing, flapping-wing, or fixed-wing configurations. Micro-electro-mechanical systems (MEMS) differential pressure sensors were attached to both the forewing and the hindwing to evaluate the aerodynamic performance during flight. Whether the forewing is configured as a flapping wing or a fixed wing, it generated constant positive differential pressure during forward flight, whereas the differential pressure on the hindwing varied with the flapping motion during forward flight. The experimental results suggest that beetles utilize the forewing for effective vertical force enhancement.

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Development of a light source with a uniform intensity reinforced by a checkerboard half-mirror positioned within inverse L-shaped UV-LED arrays

Hidetoshi Takahashi, Isao Shimoyama, Yun Jung Heo

Applied Physics Express （Japan Society of Applied Physics） 11 （ 6 ） 2018年06月

ISSN 1882-0786

This paper presents a simple, low-cost, long-lasting UV-LED-based light source with uniform light intensity using a checkerboard half-mirror positioned within inverse L-shaped UV-LED arrays. The light rays from the top UV-LED array passed through the transparent portions of the checkerboard half-mirror, while the light rays from the side UV-LED array were reflected on the remaining opaque portions at right angles. Thus, uniform light intensity was achieved on the bottom area. Using the developed UV-LED light source, we fabricated microstructures with uniform shapes on a large area, thereby showing feasible applications for MEMS fabrication.

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スパイラル管路とピエゾ抵抗型カンチレバー素子による角加速度センサ—Angular acceleration sensor with spiral gas channel and piezoresistive cantilever

高橋英俊, 菅哲朗, 中井亮仁, 髙畑智之, 下山勲

「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編] 35 3p 2018年

Scalable fabrication of microneedle arrays via spatially controlled UV exposure

Hidetoshi Takahashi, Yun Jung Heo, Nobuchika Arakawa, Tesuo Kan, Kiyoshi Matsumoto, Ryuji Kawano, Isao Shimoyama

MICROSYSTEMS & NANOENGINEERING （NATURE PUBLISHING GROUP） 2 2016年10月

ISSN 2055-7434

This paper describes a theoretical estimation of the geometry of negative epoxy-resist microneedles prepared via inclined/rotated ultraviolet (UV) lithography based on spatially controlled UV exposure doses. In comparison with other methods based on UV lithography, the present method can create microneedle structures with high scalability. When negative photoresist is exposed to inclined/rotated UV through circular mask patterns, a three-dimensional, needle-shaped distribution of the exposure dose forms in the irradiated region. Controlling the inclination angles and the exposure dose modifies the photo-polymerized portion of the photoresist, thus allowing the variation of the heights and contours of microneedles formed by using the same mask patterns. In an experimental study, the dimensions of the fabricated needles agreed well with the theoretical predictions for varying inclination angles and exposure doses. These results demonstrate that our theoretical approach can provide a simple route for fabricating microneedles with on-demand geometry. The fabricated microneedles can be used as solid microneedles or as a mold master for dissolving microneedles, thus simplifying the microneedle fabrication process. We envision that this method can improve fabrication accuracy and reduce fabrication cost and time, thereby facilitating the practical applications of microneedle-based drug delivery technology.

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マイクロピラーアレイを用いた高感度MEMS気流せん断応力センサ—High sensitive MEMS airflow shear stress sensor using a micro-pillar array

高橋英俊, 風間涼平, グェンタンヴィン, 髙畑智之, 松本潔, 下山勲

「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編] 33 1 - 4 2016年10月

チョウの離陸時における脚力の計測

黄山澄昊, 古谷龍, 高橋英俊, 高畑智之, 松本潔, 下山勲

日本機械学会ロボティクス・メカトロニクス講演会講演論文集(CD-ROM) （一般社団法人日本機械学会） 2016 ROMBUNNO.1A1‐11b5 2016年06月

We measured the jumping forces of butterflies <i>Idea leuconoe</i> during take-off. We fabricated a force plate that was composed of three MEMS (Micro Electro Mechanical Systems) force sensors and a flat plate. The three MEMS sensors were placed under the flat plate. The size of the MEMS force sensors was 7 mm×7 mm. The size of the plate was 45 mm in diameter. The resolution of the force plate was 0.20 mN. The results suggested that the maximum jumping force was 1.4 times larger on average than the gravity force. Furthermore, we revealed that the impulse of the jumping force was twice larger than the impulse of the wing aerodynamic force.

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キラリティ切替可能なMEMSスパイラルメタマテリアルTHz応答解析

菅哲朗, 磯崎瑛宏, 根本夏紀, 神田夏輝, 小西邦昭, 高橋英俊, 五神真, 松本潔, 下山勲

応用物理学会春季学術講演会講演予稿集(CD-ROM) 63rd ROMBUNNO.20P-H135-3 2016年03月

The effect of the phase angle between the forewing and hindwing on the aerodynamic performance of a dragonfly-type ornithopter

Hidetoshi Takahashi, Alice Concordel, Jamie Paik, Isao Shimoyama

Aerospace （MDPI Multidisciplinary Digital Publishing Institute） 3 （ 1 ） 2016年03月

ISSN 2226-4310

Dragonflies achieve agile maneuverability by flapping four wings independently. Different phase angles between the flapping forewing and hindwing have been observed during various flight modes. The aerodynamic performance depends on phase angle control, as exemplified by an artificial flying ornithopter. Here, we present a dragonfly-like ornithopter whose phase angle was designed to vary according to the phase lag between the slider-cranks of the forewing and hindwing. Two microelectromechanical systems (MEMS) differential pressure sensors were attached to the center of both forewing and hindwing to evaluate the aerodynamic performance during flapping motions when the phase angle was changed. By varying the phase angle in both the tethered condition and free-flight, the performance of the forewing remained approximately constant, whereas that of the hindwing exhibited obvious variations
the maximum average value was two-fold higher than the minimum. The experimental results suggest that simple phase angle changes enable a flying ornithopter to control flight force balance without complex changes in the wing kinematics.

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Chiral Switchable THz Metamaterial with MEMS Reconfigurable Spirals

Tetsuo Kan, Akihiro Isozaki, Natsuki Kanda, Natsuki Nemoto, Kuniaki Konishi, Hidetoshi Takahashi, Makoto Kuwata-Gonokami, Kiyoshi Matsumoto, Isao Shimoyama

2016 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) （IEEE） 2016年

ISSN 2160-9020

マイクロピラーアレイを用いた高感度MEMS気流せん断応力センサ

高橋英俊, 風間涼平, NGUYEN Thanh‐Vinh, 高畑智之, 松本潔, 下山勲

センサ・マイクロマシンと応用システムシンポジウム(CD-ROM) 33rd ROMBUNNO.25am2‐PS‐059 2016年

高感度・高剛性を両立するピエゾ抵抗型3軸力センサ

高橋英俊, 松本潔, 下山勲

「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編] （Institute of Electrical Engineers of Japan） 32 4p 2015年10月

可動MEMSスパイラル構造による偏光変調デバイス

菅哲朗, 磯崎瑛宏, 根本夏紀, 小西邦昭, 高橋英俊, 五神真, 松本潔, 下山勲, 神田夏輝

センサ・マイクロマシンと応用システムシンポジウム(CD-ROM) 32nd ROMBUNNO.29PM3-PS-135 2015年10月

MEMS多軸力センサを用いたハエの飛翔力計測

高橋英俊, 平川真之介, 伊藤正芳, 伊藤啓, 高畑智之, 松本潔, 下山勲

日本機械学会年次大会講演論文集(CD-ROM) （一般社団法人日本機械学会） 2015 ROMBUNNO.J0260103 - _J0260103- 2015年09月

This paper reports on measurement method of aerodynamic force of a fruit fly (Drosophila) during flapping motion using a MEMS (Micro Electro Mechanical Systems) multi axis force sensor. The proposed MEMS multi axis force sensor is composed of a Si probe and supported beams whose surface or sidewall area is doped to measure 3 axis forces and moment around the probe. The sensor size is approximately 1800 μm × 2800 μm × 35 μm. The force and moment resolution are designed to be under 1 μN and 1.0 μNm, respectively. The aerodynamic force vector can be detected by attaching a fruit fly to the tip of the probe. Using the fabricated force sensor, we developed sensor attachment setup and experimental setup to measure aerodynamic force of a fruit fly.

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蝶の離陸時の飛翔力計測

古谷龍, 風間涼平, 高橋英俊, 高畑智之, 松本潔, 下山勲

日本機械学会ロボティクス・メカトロニクス講演会講演論文集(CD-ROM) （一般社団法人日本機械学会） 2015 ROMBUNNO.2A2‐G01 - _2A2-G01_4 2015年05月

We measured the differential pressures of butterfly's wing surface at the time of take off. Simultaneously, we photographed high-speed videos from two directions. To measure the pressure, we attached a MEMS (Micro Electro Mechanical Systems) differential pressure sensor on the wing surface. We analyzed the data with the videos to calculate the lift coefficient during the flight of a butterfly. Then we revealed the number of lift coefficient during the insects' free flight. The results suggest that the number of lift coefficient was bigger at the take off compared to during a flight. Furthermore, we revealed that the number of lift coefficient agrees with conventional study that have conducted in the same Reynolds number.

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(3)小型・薄型・軽量なMEMS 3軸触覚センサの開発(技術,日本機械学会賞〔2014年度(平成26年度)審査経過報告〕)

下山勲, 中井亮仁, 高橋英俊, 永野顕法, 木鋪大樹

日本機械学會誌（一般社団法人日本機械学会） 118 （ 1158 ） 265 - 265 2015年05月

ISSN 0021-4728

圧力変動検出スイッチを付加したイベントドリブン型塵埃量センサの開発

海法克享, 高橋英俊, 富松大, 小林健, 松本潔, 下山勲, 伊藤寿浩, 前田龍太郎

精密工学会大会学術講演会講演論文集（公益社団法人精密工学会） 2015 ROMBUNNO.E67 - 326 2015年03月

本研究では，圧力変動によって駆動するスイッチを付与したイベントドリブン型塵埃量センサについて報告する。塵埃量変動は人の動きに大きく依存するため、人の動きに関連した圧力変化をトリガーとすることで、消費電力の大きい塵埃量センサの効率の良い駆動が可能となる。試作した塵埃量センサは平均消費電力が約0.1mW（1sec動作、1024secスリープで換算）となり、太陽電池のような自立電源での駆動が可能であることを示した。

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ヘルムホルツ共振器を用いた平面型音響ノッチフィルター素子

磯崎瑛宏, 高橋英俊, 田村洋人, 高畑智之, 松本潔, 下山勲

応用物理学会春季学術講演会講演予稿集(CD-ROM) 62nd ROMBUNNO.13P-D12-9 2015年02月

Viscosity measurement based on the tapping-induced free vibration of sessile droplets using MEMS-based piezoresistive cantilevers

Thanh-Vinh Nguyen, Minh-Dung Nguyen, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

LAB ON A CHIP （ROYAL SOC CHEMISTRY） 15 （ 18 ） 3670 - 3676 2015年

ISSN 1473-0197

We report a simple technique to measure the free vibration of microlitre-sized droplets using an array of thirteen MEMS-based piezoresistive cantilevers and demonstrate its application for the measurement of viscosity. Because the damping of the free vibration of a liquid droplet is known to be affected by the viscosity of the liquid, measuring the vibration of a droplet allows the viscosity to be estimated from a dilute sample volume. However, conventional methods to measure the droplet vibration require sophisticated apparatuses, which hinder the development of a portable viscometer. Here, we show that MEMS-based piezoresistive cantilevers can be an excellent tool to measure the vibration of a sessile droplet due to the high sensitivity and simplicity of the readout scheme. Using the cantilever array, we analyse the normal force distribution on the contact area of a sessile droplet in the static state and during the vibration. Next, we show that the viscosity (from similar to 1-30 mPa s) can be estimated within an error of less than 10% from the attenuation rate of the cantilever output during the tapping-induced vibration of small droplets (similar to 2.4 mu L). In addition to the advantage of the small sample volume, the proposed viscometer has simple operation and readout schemes, which are desirable for many applications, including point-of-care testing and drug development.

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気圧変化センサを利用した高度変化計測

高畑智之, 渡辺諒, DUNG Nguyen Minh, 高橋英俊, 松本潔, 下山勲

日本機械学会シンポジウム:スポーツ工学・ヒューマンダイナミクス講演論文集(CD-ROM) （一般社団法人日本機械学会） 2015 ROMBUNNO.C‐8 - _C-8-4_ 2015年

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6-AXIS FORCE/TORQUE SENSOR FOR SPIKE PINS OF SPORTS SHOES

H. Ishido, H. Takahashi, A. Nakai, T. Takahata, K. Matsumoto, I. Shimoyama

2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015) （IEEE） 2015-February 257 - 260 2015年

ISSN 1084-6999

This paper reports on a method to measure forces and torques acting on spike pins of sports shoes. We fabricated a 2 mm x 2 mm x 0.3 mm 6-axis force/torque sensor chip, which consists of 6 piezoresistive beams. From the resistance changes of the 6 beams, 6 components of forces and torques can be detected. The sensor chip was connected to a flexible printed circuit board (PCB) and covered with thin polydimethylsiloxane (PDMS). Then, the sensor chip and flexible PCB were embedded in spike-pin-shaped epoxy resin. We calibrated the spike-pin-shaped sensor, and confirmed that 6-axis forces and torques were able to be detected by the proposed sensor.

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A CANTILEVER WITH COMB STRUCTURE MODELED BY A BRISTLED WING OF THRIPS FOR SLIGHT AIR LEAK

H. Takahashi, A. Isozaki, K. Matsumoto, I. Shimoyama

2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015) （IEEE） 2015-February 706 - 709 2015年

ISSN 1084-6999

This paper reports a cantilever with comb structure, inspired by a bristled wing of thrips which acts as a continuous membrane wing because of the effects of low Reynolds numbers. The comb structures are formed at the edges of the cantilever and its surrounding frame. When differential pressure is applied to the cantilever, both comb structures act as airflow suppression through the gap. The leakage of the fabricated comb cantilever was smaller than the normal cantilever due to the overlapping area of the combs, even the gap area was twice larger. The proposed structure will be utilized as a high sensitive barometric pressure change detector.

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サブミクロンギャップを有するMEMS可変メタマテリアルの製作と設計

磯崎瑛宏, 菅哲朗, 高橋英俊, 根本夏紀, 小西邦昭, 五神真, 松本潔, 下山勲, 神田夏輝

電気学会マイクロマシン・センサシステム研究会資料 MSS-14 （ 1-4.6-23 ） 71 - 75 2014年05月

3A1-K05 羽ばたき機を用いた8の字羽ばたき運動時の翼面圧力差計測(バイオミメティクス・バイオメカトロニクス)

風間涼平, 高橋英俊, 平川真之介, 高畑智之, 松本潔, 下山勲

ロボティクス・メカトロニクス講演会講演概要集（一般社団法人日本機械学会） 2014 （ 0 ） _3A1 - K05_1-_3A1-K05_4 2014年

We measured the differential pressures of an ornithopter whose stroke trajectory was a figure of eight. Simultaneously, we visualized the flow around wing surface, and analyzed the differential pressures to connect it. To measure the pressure, we attached a MEMS differential pressure sensor on the wing surface. We designed the ornithopter which could operate a flapping motion and a lead-lag motion at the same time. The ornithopter worked by an electric motor and its flapping frequency was 6-8 Hz. The consequence of this experiment suggests that the peak of the differential pressures and the vortex around wing surface occuur at the same time during the flapping.

J0220203 アリの登攀時の床裏反力の計測([J022-02]生物規範メカニクス・システム:生物の運動、力学及びミメティクスセッション(2))

高橋英俊, 松本潔, 下山勲

年次大会（一般社団法人日本機械学会） 2014 （ 0 ） _J0220203 - -_J0220203- 2014年

This paper reports on measurement of ground reaction forces (GRFs) of ant legs during running on level ground, vertical wall and ceiling. Micro force plate array is designed and fabricated to measure anterior and vertical directional forces. Thus, GRF of all legs in the various ground angles can be detected simultaneously. The size and force resolution are 2000 μm × 1000 μm × 20 μm and 1 μN, respectively. The measurement results show that ants use different GRF distribution in three types of terrestrial locomotion. In every types of locomotion, the ant was affected by the gravity reaction force, which was totally equal to the body weight. The gravity reaction force was approximately equal to each leg during running on level ground and ceiling. The gravity reaction force during ceiling was thought to be generated by the adhesion force of sub-micron scale hairs on the tip of the legs. The measured GRF distribution clarified that ants use the different strategies of running mechanism depending on the angle of the ground against the horizon plane.

ヘルムホルツ共鳴器を並列に接続した平面形状の音響メタマテリアル

田村洋人, 高橋英俊, 高畑智之, 松本潔, 下山勲

電気学会研究会資料. PHS, フィジカルセンサ研究会 2013 （ 20 ） 35 - 38 2013年08月

1A1-A12 翅脈の弾性が異なる羽ばたき機を用いた翼面圧力差計測(バイオミメティクス・バイオメカトロニクス(1))

平川真之介, 高橋英俊, 高畑智之, 松本潔, 下山勲

ロボティクス・メカトロニクス講演会講演概要集（一般社団法人日本機械学会） 2013 1A1 - A12(1)"-"1A1-A12(4)" 2013年05月

We measured differential pressures on the wing of an ornithopter with different stiffness of veins in flapping motion. The pressure measurement was carried out by using a MEMS differential pressure sensor attached on the wing surface. The ornithopter was modeled after a hawkmoth. The wing length was 110 mm, and total mass was 7.3-7.7 g. We fabricated three types of wings which had veins of different cross-section. In the experiment, the ornithopter was propelled by an electric motor and flapped at 10-11 Hz. The result suggested that when a wing is flexible, the different pressure on the wing is small, but the passive deformation of the wing is large during takeoff, then the ornithopter can fly by being subjected to thrust during upstroke and lift during downstroke.

2P1-G09 インソールに配置したMEMS3軸力センサによる足裏応力分布計測(感覚・運動・計測(3))

中井亮仁, 永野顕法, 高橋英俊, 松本潔, 下山勲

ロボティクス・メカトロニクス講演会講演概要集（一般社団法人日本機械学会） 2013 2P1 - G09(1)"-"2P1-G09(2)" 2013年05月

We proposed and demonstrated a wireless measurement system of 3-axis stress distribution at a human sole. The system consists of three 3-axis force sensors fabricated by MEMS (Micro Electro Mechanical Systems) technologies which were placed on the heel, thenar and hypothenar, three amplifier circuit boards and a CPU board with a Bluetooth module. The 3-axis stresses composed of normal stress of vertical direction and shear stresses of lateral and front-back directions were measured and calibrated for crosstalk compensation in level walk. The peak stresses of vertical, lateral and front-back directions are about 100kPa at the heel and thenar, 15kPa at the thenar and 20kPa at the heel, respectively.

MEMS3軸力センサを用いた階段昇降時の足裏応力分布計測

中井亮仁, 永野顕法, 高橋英俊, 松本潔, 下山勲

日本機械学会シンポジウム:スポーツ・アンド・ヒューマン・ダイナミクス(CD-ROM) 2013 ROMBUNNO.134 2013年

PZTカンチレバーを用いた高感度低消費電力の差圧センサ

海法克享, 高橋英俊, 富松大, 小林健, 松本潔, 下山勲, 伊藤寿浩, 前田龍太郎

センサ・マイクロマシンと応用システムシンポジウム(CD-ROM) 30th ROMBUNNO.6PM3-PSS-38 2013年

AlN cantilever for differential pressure sensor

Yutaka Tomimatsu, Hidetoshi Takahashi, Takeshi Kobayashi, Kiyoshi Matsumoto, Isao Shimoyama, Toshihiro Itoh, Ryutaro Maeda

2013 IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRIC AND WORKSHOP ON THE PIEZORESPONSE FORCE MICROSCOPY (ISAF/PFM) （IEEE） 336 - 339 2013年

The differential pressure sensors are used for various applications. In this work, a piezoelectric differential pressure sensor using an aluminum nitride (AIN) thin film cantilever is proposed to achieve high sensitivity and low power consumption. The dimensions of the cantilever are 1500 mu m x 1000 mu m x 2 mu m. The proposed sensor needs no power consumption in the AIN sensing element in principle. The sensor design was validated by measuring the performance of the sensor, which showed sensitivity of 8.2 mV/Pa from -20 Pa to 20 Pa

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107 素足歩行時に足にかかる力の計測(運動計測(2))

堀正峻, 高橋英俊, 中井亮仁, 松本潔, 下山勲

シンポジウム: スポーツ・アンド・ヒューマン・ダイナミクス講演論文集（一般社団法人日本機械学会） 2012 60 - 63 2012年11月

We fabricated the 3-axis force sensor applicable to gait analysis. The 3-axis force sensor was fabricated by MEMS (Micro Electro Mechanical Systems) process. Its size was 8 mm x 8 mm * 5 mm and its weight was 0.6 g. The sensor was attached to the sole of the left foot. The sensor's size and weight were so small that it didn't interfere with human locomotion. Using this sensor, regional plantar 3-axis forces were measured during level walking on inside floor. From this measurement, peak values of forces experienced under third metatarsal were revealed; the peak value of vertical force was about 200N and that of antero-posterior shear force was about 90 N.

サイドウォールドーピングを用いた3軸触覚センサ

高橋英俊, 中井亮仁, 松本潔, 下山勲

センサ・マイクロマシンと応用システムシンポジウム(CD-ROM) 29th ROMBUNNO.SP4-3 2012年10月

多足歩行ロボットの歩行時に足にかかる力の計測

堀正峻, 高橋英俊, 中井亮仁, 松本潔, 下山勲

日本ロボット学会学術講演会予稿集(CD-ROM) 30th ROMBUNNO.3I1-2 2012年09月

CARBON DIOXIDE DETECTION BY SURFACE PLASMON RESONANCE WITH IONIC LIQUID

K. Ishizu, T. Kan, Y. Takei, H. Takahashi, K. Matsumoto, I. Shimoyama

2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) （IEEE） 784 - 787 2012年

ISSN 1084-6999

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Differential pressure measurement of an insect wing using a MEMS sensor

Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

2012 ICME International Conference on Complex Medical Engineering, CME 2012 Proceedings 349 - 352 2012年

An insect can perform flight maneuvers such as hovering and snap turns. There have been many methods such as digital particle image velocimetry (DPIV) or kinematic analysis using robotic wings modeled on insects to investigate the aerodynamic force. The aerodynamic force is derived from the differential pressure between the upper and lower surfaces of its wings. The actual aerodynamic force on real insect wings has never been measured directly during free flight. Here we show direct measurement of differential pressure acting on the wing surface of a real insect during free flight. A micro differential pressure sensor was fabricated by utilizing micro electro mechanical systems (MEMS) and fixed to a butterfly (Papilio protenor) wing. The size and weight of the sensor chip are 1.0 mm x 1.0 mm x 0.3 mm and 0.7 mg, respectively. The differential pressures were measured during takeoff. From the measured differential pressure distribution, aerodynamic force was calculated. The maximum aerodynamic force generated on the wings was 3 times larger than the gravity acting on the body. © 2012 IEEE.

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サイドウォールドーピングを用いたピエゾ抵抗型三軸力センサ

菅哲朗, 高橋英俊, 青山雄一郎, 竹井裕介, 野田堅太郎, 松本潔, 下山勲

センサ・マイクロマシンと応用システムシンポジウム(CD-ROM) 28th ROMBUNNO.P4-3 2011年09月

G020034 チョウの離陸時における圧力差分布([G02003]バイオエンジニアリング部門一般セッション(3))

高橋英俊, 松本潔, 下山勲

年次大会 : Mechanical Engineering Congress, Japan （一般社団法人日本機械学会） 2011 "G020034 - 1"-"G020034-3" 2011年09月

This paper reports on direct measurement of differential pressure distribution on a butterfly wing during takeoff. Differential pressure was measured with a micro-fabricated sensor. A MEMS (Micro Electro Mechanical Systems) piezo-resistive cantilever was used as the differential pressure sensor. The sensor chip was 1.0 mm x 1.0 mm x 0.3 mm in size and 0.7 mg in weight. The sensor was attached to a butterfly (Papilio protenor) wing surface through a Cu/Polyimide substrate and Au wires. The total weight was 30 mg so that it did not interfere with flight condition. The distribution of five points to the spanwise direction at the forewing and one point at the center of the hindwing was measured during takeoff. As a result, it was clarified that the maximum differential pressure was 20 Pa on the forewing tip. Additionally, the maximum aerodynamic force generated on the wing was 3 times larger than the gravity acting on the body.

MICRO SUCTION CUP ARRAY FOR WET/DRY ADHESION

N. Thanh-Vinh, H. Takahashi, T. Kan, K. Noda, K. Matsumoto, I. Shimoyama

2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) （IEEE） 284 - 287 2011年

ISSN 1084-6999

We propose a micro suction cup array for adhesion to both dry and wet surfaces. We measured the peel-off forces of a PDMS micro suction cup array, a PDMS flat-tip micro structure array and a flat PDMS pad from both wet and dry glass surfaces. When the glass surface was wet, the peel-off forces of a PDMS flat-tip micro pattern and a flat PDMS pad decreased by more than 1.7 times and 7.0 times, respectively. On the other hand, peel-off forces of a PDMS micro suction cup array increased by over 1.1 times when the glass surface was wet. Also, in both wet and dry conditions, an array of PDMS micro suction cup adhered stronger to a glass surface than a PDMS flat-tip micro pattern and a flat PDMS pad. Furthermore, we demonstrated that the adhesion of a suction cup array can be enhanced by miniaturizing the size of the cups.

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J0205-1-1 チョウ翼面における圧力差計測([J0205-1]バイオメカニズム/バイオミメティクス/バイオインスパイアー(1))

高橋英俊, 松本潔, 下山勲

年次大会講演論文集 : JSME annual meeting （一般社団法人日本機械学会） 2010 （ 6 ） 27 - 28 2010年09月

This paper reports on direct measurement of differential pressure on a butterfly wing during free flight. Differential pressure was measured using a micro-fabricated sensor. A piezo-resistive cantilever was used as a differential pressure sensor. The sensor was 1.0 mm × 1.0 mm × 0.3 mm in size and 0.7 mg in weight so that it did not interfere with wing motion. By attaching the sensor to the center of a butterfly forewing with a flexible wiring, the differential pressure on the wing was measured during free flight. We revealed that the maximum pressure value was 11.7 Pa at the end of stroke. The maximum aerodynamic force in free-flight is 10 times as large as the gravity acting on the body.

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MEMS差圧センサを搭載した羽ばたき機を用いた昆虫飛翔の研究

高橋英俊, 大澤一治, 青山雄一郎, 松本潔, 下山勲

飛行機シンポジウム講演集(CD-ROM) 48th ROMBUNNO.2C6 2010年

単一センサによる音源定位のためのキリギリス規範音響センサ

稲葉亮, NGUYEN Minh Dung, 高橋英俊, 岩瀬英治, 松本潔, 下山勲

日本ロボット学会学術講演会予稿集(CD-ROM) 27th ROMBUNNO.2I1-03 2009年09月

昆虫型羽ばたき機を用いた翼面圧力の計測

青山雄一郎, 大澤一治, 高橋英俊, 岩瀬英治, 松本潔, 下山勲

日本ロボット学会学術講演会予稿集(CD-ROM) 27th ROMBUNNO.1M3-07 2009年09月

J0202-1-6 MEMSセンサを用いた昆虫型羽ばたき翼における差圧計測(生物の機能・運動と模倣(1))

高橋英俊, 松本潔, 下山勲

年次大会講演論文集 : JSME annual meeting （一般社団法人日本機械学会） 2009 （ 6 ） 135 - 136 2009年09月

An insect generates differential pressure between the upper and lower surface of its wings by flapping motion. The insect flies by utilizing that pressure difference as aerodynamic force. In the present study, a high-sensitive sensor utilizing MEMS technology was fabricated to measure the differential pressure. A piezoresistance cantilever was used as the differential pressure sensor. The size of the sensor was 1.5 × 1.5 × 0.3 mm^3, which was small enough not to interfere with the wings under flapping state. The measurement range and resolution were 100 Pa and 0.1 Pa, respectively. By fixing the sensors to an artificial insect wing surface, we demonstrated that the differential pressure distribution was enabled to measure.

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マイクロコイルを用いた微小領域MRI画像計測の研究

土肥徹次, 高橋英俊, 桑名健太, 下山勲

電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan 2008 （ 16 ） 19 - 22 2008年09月

1P1-H08 ヘルムホルツ共鳴を利用したマイクロ超音波センサ(非接触センシング)

鈴木明, 高橋英俊, 岩瀬英治, 松本潔, 下山勲

ロボティクス・メカトロニクス講演会講演概要集（一般社団法人日本機械学会） 2008 "1P1 - H08(1)"-"1P1-H08(4)" 2008年06月

We propose a method to improve the sensitivity of a micro ultrasonic wave sensor using Helmholtz resonance. By this method, we improve the sensitivity by 23.8 [dB], getting 15.5 times greater amplitude of the vibration of the cantilever, which was used as the sensor, compared with the normal cantilever. We also made two more experiments to measure how the sensitivity changed according to the relationship between the resonance frequency of the Helmholtz cabity and the natural frequency of the cantilever. As a result, the sensitivity was the highest when these two frequencies were the same. The peak of resonance was not so sharp that the sensitivity was more than the half of its maximum when the resonance frequency of the Helmholtz cabity was in the range of 92.6 - 108.9% of the natural frequency of the cantilever. Moreover, there was also a peak at the resonance frequency on the frequency properly of the sensor, even if there was a small gap between the two frequencies.

1505 平面型マイクロコイルを用いた局所高分解能MRIに関する研究(口頭講演,トピックスセッション:革新的診断治療)

土肥徹次, 高橋英俊, 桑名健太, 松本潔, 下山勲

IIP情報・知能・精密機器部門講演会講演論文集（一般社団法人日本機械学会） 2008 166 - 168 2008年03月

This paper reports on a micro planar coil as a receiver for a high resolution MRI (Magnetic Resonance Imaging). In this study, a micro planar coil of 10 mm in diameter was fabricated. The MRI signal receiving device was made by attaching the micro coils to the tip of acrylic pipes. The signal to noise ratio of MR image taken by the micro planar coil was 8 times as high as MR image taken by medical MRI coil. MR images of okra (Abelmoschus esculentus) were acquired with 2.0×2.0×2.0 mm^3 and 0.5×0.5×1.0 mm^3 resolutions.

2P2-C04 トンボ型飛行における羽ばたき位相差の影響の研究

高橋英俊, 田中博人, 星野一憲, 松本潔, 下山勲

ロボティクス・メカトロニクス講演会講演概要集（一般社団法人日本機械学会） 2006 "2P2 - C04(1)"-"2P2-C04(2)" 2006年

We reported on the effect of the phase relationship between forewings and hindwings in the dragonfly flight. The dragonfly-type ornithopters (DTOs) were developed to investigate the flapping flight. The wing span of DTO is 100 mm long. Reynolds number is the same order as Dragonfly's Reynolds number (10^3). Flights of DTOs with various phase relationships were recorded with a high speed video camera, and their motions were analyzed. We also visualized air flow around the wings in a wind tunnel. We demonstrated that there are phase relationships for accelerating flight (45°), low speed flight (180°), high speed flight (270°,315°). This relationship between flight and phase almost matched that of dragonflies.

模型羽ばたき飛行機を用いた昆虫飛翔の研究

田中博人, 高橋英俊, 松本潔, 下山勲

飛行機シンポジウム講演集(CD-ROM) 44th 2A2 2006年

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