総説・解説等 - 高橋　英俊

MEMS力センサを用いた心筋細胞の拍動計測

池上怜汰, 塚越拓哉, 松平謙英, 平山佳代子, 高橋英俊, NGUYEN Thanh-Vinh, 玉本拓巳, LI Fengyu, 野田堅太郎, 小柳健一, 大島徹, 下山勲

電子情報通信学会技術研究報告(Web) 122 （ 152(ED2022 17-23) ）  2022年

ISSN  2432-6380

Experimental study of the aerodynamic interaction between the forewing and hindwing of a beetle-type ornithopter

Hidetoshi Takahashi, Kosuke Abe, Tomoyuki Takahata, Isao Shimoyama

Aerospace （MDPI）  5 （ 3 ）  2018年09月

　概要を見る

© 2018 by the authors. Beetles have attracted attention from researchers due to their unique combination of a passively flapping forewing and an actively flapping hindwing during flight. Because the wing loads of beetles are larger than the wing loads of other insects, the mechanism of beetle flight is potentially useful for modeling a small aircraft with a large weight. In this paper, we present a beetle-type ornithopter in which the wings are geometrically and kinematically modeled after an actual beetle. Furthermore, the forewing is designed to be changeable between no-wing, flapping-wing, or fixed-wing configurations. Micro-electro-mechanical systems (MEMS) differential pressure sensors were attached to both the forewing and the hindwing to evaluate the aerodynamic performance during flight. Whether the forewing is configured as a flapping wing or a fixed wing, it generated constant positive differential pressure during forward flight, whereas the differential pressure on the hindwing varied with the flapping motion during forward flight. The experimental results suggest that beetles utilize the forewing for effective vertical force enhancement.

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Development of a light source with a uniform intensity reinforced by a checkerboard half-mirror positioned within inverse L-shaped UV-LED arrays

Hidetoshi Takahashi, Isao Shimoyama, Yun Jung Heo

Applied Physics Express （Japan Society of Applied Physics）  11 （ 6 ）  2018年06月

ISSN  1882-0786

　概要を見る

This paper presents a simple, low-cost, long-lasting UV-LED-based light source with uniform light intensity using a checkerboard half-mirror positioned within inverse L-shaped UV-LED arrays. The light rays from the top UV-LED array passed through the transparent portions of the checkerboard half-mirror, while the light rays from the side UV-LED array were reflected on the remaining opaque portions at right angles. Thus, uniform light intensity was achieved on the bottom area. Using the developed UV-LED light source, we fabricated microstructures with uniform shapes on a large area, thereby showing feasible applications for MEMS fabrication.

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スパイラル管路とピエゾ抵抗型カンチレバー素子による角加速度センサ—Angular acceleration sensor with spiral gas channel and piezoresistive cantilever

高橋 英俊, 菅 哲朗, 中井 亮仁, 髙畑 智之, 下山 勲

「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 35   3p 2018年

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Scalable fabrication of microneedle arrays via spatially controlled UV exposure

Hidetoshi Takahashi, Yun Jung Heo, Nobuchika Arakawa, Tesuo Kan, Kiyoshi Matsumoto, Ryuji Kawano, Isao Shimoyama

MICROSYSTEMS & NANOENGINEERING （NATURE PUBLISHING GROUP）  2 2016年10月

ISSN  2055-7434

　概要を見る

This paper describes a theoretical estimation of the geometry of negative epoxy-resist microneedles prepared via inclined/rotated ultraviolet (UV) lithography based on spatially controlled UV exposure doses. In comparison with other methods based on UV lithography, the present method can create microneedle structures with high scalability. When negative photoresist is exposed to inclined/rotated UV through circular mask patterns, a three-dimensional, needle-shaped distribution of the exposure dose forms in the irradiated region. Controlling the inclination angles and the exposure dose modifies the photo-polymerized portion of the photoresist, thus allowing the variation of the heights and contours of microneedles formed by using the same mask patterns. In an experimental study, the dimensions of the fabricated needles agreed well with the theoretical predictions for varying inclination angles and exposure doses. These results demonstrate that our theoretical approach can provide a simple route for fabricating microneedles with on-demand geometry. The fabricated microneedles can be used as solid microneedles or as a mold master for dissolving microneedles, thus simplifying the microneedle fabrication process. We envision that this method can improve fabrication accuracy and reduce fabrication cost and time, thereby facilitating the practical applications of microneedle-based drug delivery technology.

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マイクロピラーアレイを用いた高感度MEMS気流せん断応力センサ—High sensitive MEMS airflow shear stress sensor using a micro-pillar array

高橋 英俊, 風間 涼平, グェン タンヴィン, 髙畑 智之, 松本 潔, 下山 勲

「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 33   1 - 4 2016年10月

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チョウの離陸時における脚力の計測

黄山澄昊, 古谷龍, 高橋英俊, 高畑智之, 松本潔, 下山勲

日本機械学会ロボティクス・メカトロニクス講演会講演論文集(CD-ROM) （一般社団法人 日本機械学会）  2016   ROMBUNNO.1A1‐11b5 2016年06月

　概要を見る

We measured the jumping forces of butterflies <i>Idea leuconoe</i> during take-off. We fabricated a force plate that was composed of three MEMS (Micro Electro Mechanical Systems) force sensors and a flat plate. The three MEMS sensors were placed under the flat plate. The size of the MEMS force sensors was 7 mm×7 mm. The size of the plate was 45 mm in diameter. The resolution of the force plate was 0.20 mN. The results suggested that the maximum jumping force was 1.4 times larger on average than the gravity force. Furthermore, we revealed that the impulse of the jumping force was twice larger than the impulse of the wing aerodynamic force.

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キラリティ切替可能なMEMSスパイラルメタマテリアルTHz応答解析

菅哲朗, 磯崎瑛宏, 根本夏紀, 神田夏輝, 小西邦昭, 高橋英俊, 五神真, 松本潔, 下山勲

応用物理学会春季学術講演会講演予稿集(CD-ROM) 63rd   ROMBUNNO.20P-H135-3 2016年03月

The effect of the phase angle between the forewing and hindwing on the aerodynamic performance of a dragonfly-type ornithopter

Hidetoshi Takahashi, Alice Concordel, Jamie Paik, Isao Shimoyama

Aerospace （MDPI Multidisciplinary Digital Publishing Institute）  3 （ 1 ）  2016年03月

ISSN  2226-4310

　概要を見る

Dragonflies achieve agile maneuverability by flapping four wings independently. Different phase angles between the flapping forewing and hindwing have been observed during various flight modes. The aerodynamic performance depends on phase angle control, as exemplified by an artificial flying ornithopter. Here, we present a dragonfly-like ornithopter whose phase angle was designed to vary according to the phase lag between the slider-cranks of the forewing and hindwing. Two microelectromechanical systems (MEMS) differential pressure sensors were attached to the center of both forewing and hindwing to evaluate the aerodynamic performance during flapping motions when the phase angle was changed. By varying the phase angle in both the tethered condition and free-flight, the performance of the forewing remained approximately constant, whereas that of the hindwing exhibited obvious variations
the maximum average value was two-fold higher than the minimum. The experimental results suggest that simple phase angle changes enable a flying ornithopter to control flight force balance without complex changes in the wing kinematics.

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Chiral Switchable THz Metamaterial with MEMS Reconfigurable Spirals

Tetsuo Kan, Akihiro Isozaki, Natsuki Kanda, Natsuki Nemoto, Kuniaki Konishi, Hidetoshi Takahashi, Makoto Kuwata-Gonokami, Kiyoshi Matsumoto, Isao Shimoyama

2016 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) （IEEE）   2016年

ISSN  2160-9020

　概要を見る

We proposed a chiral switchable metamaterial using MEMS technology in the terahertz frequency region. Deformation of a flat metal spiral unit of the metamaterial creates three-dimensional spirals, and symmetrical chiral switching of the spiral could be performed by selecting the deformation directions; upper or lower. Ellipticity modulations amplitude as large as +/- 28 degrees could be obtained in 1.08 THz, and optical responses were numerically analyzed.

マイクロピラーアレイを用いた高感度MEMS気流せん断応力センサ

高橋英俊, 風間涼平, NGUYEN Thanh‐Vinh, 高畑智之, 松本潔, 下山勲

センサ・マイクロマシンと応用システムシンポジウム(CD-ROM) 33rd   ROMBUNNO.25am2‐PS‐059 2016年

高感度・高剛性を両立するピエゾ抵抗型3軸力センサ

高橋 英俊, 松本 潔, 下山 勲

「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] （Institute of Electrical Engineers of Japan）  32   4p 2015年10月

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可動MEMSスパイラル構造による偏光変調デバイス

菅哲朗, 磯崎瑛宏, 根本夏紀, 小西邦昭, 高橋英俊, 五神真, 松本潔, 下山勲, 神田夏輝

センサ・マイクロマシンと応用システムシンポジウム(CD-ROM) 32nd   ROMBUNNO.29PM3-PS-135 2015年10月

MEMS多軸力センサを用いたハエの飛翔力計測

高橋英俊, 平川真之介, 伊藤正芳, 伊藤啓, 高畑智之, 松本潔, 下山勲

日本機械学会年次大会講演論文集(CD-ROM) （一般社団法人 日本機械学会）  2015   ROMBUNNO.J0260103 - _J0260103- 2015年09月

　概要を見る

This paper reports on measurement method of aerodynamic force of a fruit fly (Drosophila) during flapping motion using a MEMS (Micro Electro Mechanical Systems) multi axis force sensor. The proposed MEMS multi axis force sensor is composed of a Si probe and supported beams whose surface or sidewall area is doped to measure 3 axis forces and moment around the probe. The sensor size is approximately 1800 μm × 2800 μm × 35 μm. The force and moment resolution are designed to be under 1 μN and 1.0 μNm, respectively. The aerodynamic force vector can be detected by attaching a fruit fly to the tip of the probe. Using the fabricated force sensor, we developed sensor attachment setup and experimental setup to measure aerodynamic force of a fruit fly.

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蝶の離陸時の飛翔力計測

古谷龍, 風間涼平, 高橋英俊, 高畑智之, 松本潔, 下山勲

日本機械学会ロボティクス・メカトロニクス講演会講演論文集(CD-ROM) （一般社団法人 日本機械学会）  2015   ROMBUNNO.2A2‐G01 - _2A2-G01_4 2015年05月

　概要を見る

We measured the differential pressures of butterfly's wing surface at the time of take off. Simultaneously, we photographed high-speed videos from two directions. To measure the pressure, we attached a MEMS (Micro Electro Mechanical Systems) differential pressure sensor on the wing surface. We analyzed the data with the videos to calculate the lift coefficient during the flight of a butterfly. Then we revealed the number of lift coefficient during the insects' free flight. The results suggest that the number of lift coefficient was bigger at the take off compared to during a flight. Furthermore, we revealed that the number of lift coefficient agrees with conventional study that have conducted in the same Reynolds number.

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(3)小型・薄型・軽量なMEMS 3軸触覚センサの開発(技術,日本機械学会賞〔2014年度(平成26年度)審査経過報告〕)

下山 勲, 中井 亮仁, 高橋 英俊, 永野 顕法, 木鋪 大樹

日本機械学會誌 （一般社団法人日本機械学会）  118 （ 1158 ） 265 - 265 2015年05月

ISSN  0021-4728

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圧力変動検出スイッチを付加したイベントドリブン型塵埃量センサの開発

海法克享, 高橋英俊, 富松大, 小林健, 松本潔, 下山勲, 伊藤寿浩, 前田龍太郎

精密工学会大会学術講演会講演論文集 （公益社団法人 精密工学会）  2015   ROMBUNNO.E67 - 326 2015年03月

　概要を見る

本研究では，圧力変動によって駆動するスイッチを付与したイベントドリブン型塵埃量センサについて報告する。塵埃量変動は人の動きに大きく依存するため、人の動きに関連した圧力変化をトリガーとすることで、消費電力の大きい塵埃量センサの効率の良い駆動が可能となる。試作した塵埃量センサは平均消費電力が約0.1mW（1sec動作、1024secスリープで換算）となり、太陽電池のような自立電源での駆動が可能であることを示した。

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ヘルムホルツ共振器を用いた平面型音響ノッチフィルター素子

磯崎瑛宏, 高橋英俊, 田村洋人, 高畑智之, 松本潔, 下山勲

応用物理学会春季学術講演会講演予稿集(CD-ROM) 62nd   ROMBUNNO.13P-D12-9 2015年02月

Viscosity measurement based on the tapping-induced free vibration of sessile droplets using MEMS-based piezoresistive cantilevers

Thanh-Vinh Nguyen, Minh-Dung Nguyen, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

LAB ON A CHIP （ROYAL SOC CHEMISTRY）  15 （ 18 ） 3670 - 3676 2015年

ISSN  1473-0197

　概要を見る

We report a simple technique to measure the free vibration of microlitre-sized droplets using an array of thirteen MEMS-based piezoresistive cantilevers and demonstrate its application for the measurement of viscosity. Because the damping of the free vibration of a liquid droplet is known to be affected by the viscosity of the liquid, measuring the vibration of a droplet allows the viscosity to be estimated from a dilute sample volume. However, conventional methods to measure the droplet vibration require sophisticated apparatuses, which hinder the development of a portable viscometer. Here, we show that MEMS-based piezoresistive cantilevers can be an excellent tool to measure the vibration of a sessile droplet due to the high sensitivity and simplicity of the readout scheme. Using the cantilever array, we analyse the normal force distribution on the contact area of a sessile droplet in the static state and during the vibration. Next, we show that the viscosity (from similar to 1-30 mPa s) can be estimated within an error of less than 10% from the attenuation rate of the cantilever output during the tapping-induced vibration of small droplets (similar to 2.4 mu L). In addition to the advantage of the small sample volume, the proposed viscometer has simple operation and readout schemes, which are desirable for many applications, including point-of-care testing and drug development.

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気圧変化センサを利用した高度変化計測

高畑智之, 渡辺諒, DUNG Nguyen Minh, 高橋英俊, 松本潔, 下山勲

日本機械学会シンポジウム:スポーツ工学・ヒューマンダイナミクス講演論文集(CD-ROM) （一般社団法人 日本機械学会）  2015   ROMBUNNO.C‐8 - _C-8-4_ 2015年

　概要を見る

We propose a precise altitude change measurement method by sensor fusion of sensitive pressure change sensor, which is based on MEMS differential pressure sensor, and commonly used pressure sensor. Precision of the fused pressure measurement was as high as 0.1 Pa. We measured the pressure change during walking up stairs.

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