論文 - 閻　紀旺

Surface modification of tungsten carbide cobalt by electrical discharge coating with quarry dust suspension

Yap C.Y., Liew P.J., Yan J.

International Journal of Advanced Manufacturing Technology （International Journal of Advanced Manufacturing Technology）  111 （ 7-8 ） 2105 - 2116 2020年

ISSN  02683768

　概要を見る

© 2020, Springer-Verlag London Ltd., part of Springer Nature. This study explores the feasibility of reusing waste quarry dust as a coating material for surface modification of tungsten carbide cobalt (WC-Co) using electrical discharge coating (EDC). The main objective is to investigate the effect of quarry dust suspension with different concentrations (0–40 g/l) on the characteristics of coated surface such as coating layer thickness, coating element composition and chemical compound, surface morphology, surface roughness and Vickers micro-hardness. Before the EDC process, characterisation of the raw quarry dust was conducted through scanning electron microscopy, X-ray fluorescence and particle size analyser. The results showed that the coating layer thickness was strongly affected by the quarry dust concentration. The formation of hard carbides (SiC, Mg2C3, Fe2C and CaC2) and oxide phases (SiO2, Al2O3, Fe2O3, CaO, CoO and ZnO) in the coated layer due to material migration was confirmed through X-ray diffraction analysis. Vickers micro-hardness of the coated surface was improved significantly with the addition of quarry dust. The best surface finish without micropores and microcracks was obtained using a quarry dust concentration of 10 g/l. These results demonstrated the capability of recycling quarry dust as an environmentally friendly coating material for surface modification.

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Softening and hardening on a Zr-based bulk metallic glass induced by nanosecond laser surface melting

Jiao Y., Brousseau E., Kosai K., Lunt A.J.G., Yan J., Han Q., Zhu H., Bigot S., He W.

Materials Science and Engineering A （Materials Science and Engineering A）  803 2020年

ISSN  09215093

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© 2020 Elsevier B.V. The study reported here confirms that laser surface melting (LSM) can be employed to modify the hardness and the shear banding behaviour of bulk metallic glasses (BMGs). More specifically, by conducting LSM operations on the Zr-based Vitreloy 105 BMG in ambient atmosphere using a nanosecond laser, it was found that surface hardening can be achieved, in addition to the well-known surface softening effect. Besides, it was found that the presence of compressive residual stress and an increased introduction of crystalline precipitates accompanied LSM-induced surface hardening. On the contrary, tensile residual stress and a reduced fraction of crystalline precipitates were observed for a softened surface post-LSM. Finally, differences in shear-banding mechanisms were detected near the surface of the laser irradiated regions. More specifically, overall reduced serrated flow but important surface shear bands events were observed following the LSM-based introduction of compressive residual stress. In contrast, more pronounced serrated flows and the likely distribution of shear banding activity well beneath the irradiated BMG surface was promoted when LSM resulted in the introduction of tensile residual stress.

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Laser induced micro-cracking of Zr-based metallic glass using 1011 W/m2 nano-pulses

H Huang, Y Qian, C Wang, J Yan

Materials Today Communications 25, 101554 2020年

Distortion measurement of optical system using phase diffractive beam splitter

Wang F., Zhang Z., Wang R., Zeng X., Yang X., Lv S., Zhang F., Xue D., Yan J., Zhang X.

Optics Express （Optics Express）  27 （ 21 ） 29803 - 29816 2019年10月

　概要を見る

© 2019 Optical Society of America Traditional methods for distortion measurement of large-aperture optical systems are time-consuming and ineffective because they require each field of view to be individually measured using a high-precision rotating platform. In this study, a new method that uses a phase diffractive beam splitter (DBS) is proposed to measure the distortion of optical systems, which has great potential application for the large-aperture optical system. The proposed method has a very high degree of accuracy and is extremely economical. A high-precision calibration method is proposed to measure the angular distribution of the DBS. The uncertainty analysis of the factors involved in the measurement process has been performed to highlight the low level of errors in the measurement methodology. Results show that high-precision measurements of the focal length and distortion were successfully achieved with high efficiency. The proposed method can be used for large-aperture wide-angle optical systems such as those used for aerial mapping applications.

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Effect of the pillar size on the electrochemical performance of laser-induced silicon micropillars as anodes for lithium-ion batteries

Yang X., Tachikawa N., Katayama Y., Li L., Yan J.

Applied Sciences (Switzerland) （Applied Sciences (Switzerland)）  9 （ 17 ）  2019年09月

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© 2019 by the authors. Silicon micropillars with tunable sizes are successfully fabricated on copper foils by using nanosecond-pulsed laser irradiation and then used as anodes for lithium-ion batteries. The size of the silicon micropillars is manipulated by using different slurry layer thicknesses ranging from a few microns to tens of microns. The effects of the pillar size on electrochemical properties are thoroughly investigated. The smaller the pillars, the better the electrochemical performance. A capacity of 1647 mAh g-1 at 0.1 C current rate is achieved in the anode with the smallest pillars, with 1215, 892, and 582 mAh g-1 at 0.2, 0.5, and 1.0 C, respectively. Although a significant difference in discharge capacity is observed in the early period of cycling among micropillars of different sizes, this discrepancy becomes smaller as a function of the cycle number. Morphological studies reveal that the expansion of micropillars occurred during long-term cycling, which finally led to the formation of island-like structures. Also, the formation of a solid electrolyte interphase film obstructs Li+ diffusion into Si for lithiation, resulting in capacity decay. This study demonstrates the importance of minimizing the pillar size and optimizing the pillar density during anode fabrication.

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Improving the surface integrity of additive-manufactured metal parts by ultrasonic vibration-assisted burnishing

Teramachi A., Yan J.

Journal of Micro and Nano-Manufacturing （Journal of Micro and Nano-Manufacturing）  7 （ 2 ）  2019年06月

ISSN  21660468

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Copyright © 2019 by ASME. Metal additive manufacturing (AM) has been attracting attention as a new manufacturing method, but a surface finishing process is usually needed to improve the surface quality. As a new surface finishing process, ultrasonic vibration-assisted burnishing (UVAB) is promising. In this study, UVAB was performed on an additive-manufactured AlSi10Mg workpiece to improve its surface/subsurface integrity. The effects of ultrasonic vibration (UV) and lateral tool pass width on the burnishing performance were investigated. It was observed that the surface roughness, filling ratio, and hardness of the surface layer were simultaneously improved after burnishing. This study shows the effectiveness of applying UVAB to improve the surface quality of additivemanufactured products for various industrial uses.

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Manufacturing technologies toward extreme precision

Zhang Z., Yan J., Kuriyagawa T.

International Journal of Extreme Manufacturing （International Journal of Extreme Manufacturing）  1 （ 2 ）  2019年06月

ISSN  26318644

　概要を見る

© 2019 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT Precision is one of the most important aspects of manufacturing. High precision creates high quality, high performance, exchangeability, reliability, and added value for industrial products. Over the past decades, remarkable advances have been achieved in the area of high-precision manufacturing technologies, where the form accuracy approaches the nanometer level and surface roughness the atomic level. These extremely high precision manufacturing technologies enable the development of high-performance optical elements, semiconductor substrates, biomedical parts, and so on, thereby enhancing the ability of human beings to explore the macro- and microscopic mysteries and potentialities of the natural world. In this paper, state-of-the-art high-precision material removal manufacturing technologies, especially ultraprecision cutting, grinding, deterministic form correction polishing, and supersmooth polishing, are reviewed and compared with insights into their principles, methodologies, and applications. The key issues in extreme precision manufacturing that should be considered for future R&D are discussed.

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2成分の波状微細構造をもつロール金型の超精密切削加工

寺林俊雄，閻 紀旺

日本機械学会論文集 85 （ 874 ） 1-18 2019年06月

研究論文（学術雑誌）, 共著, 査読有り

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Formation behavior of laser-induced periodic surface structures on stainless tool steel in various media

Kobayashi T., Wakabayashi T., Takushima Y., Yan J.

Precision Engineering （Precision Engineering）  57   244 - 252 2019年05月

ISSN  01416359

　概要を見る

© 2019 Elsevier Inc. The formation of laser-induced periodic surface structure (LIPSS) has been observed on various materials. As LIPSS can be used for modifying various surface properties such as wettability, tribology and optical performance, the control of the period and topography of LIPSS is an important issue. In this study, picosecond pulsed laser irradiation was performed on a stainless tool steel in various types of media including the air, water, sugar syrup (water and sucrose (C 12 H 22 O 11 )), decane (C 10 H 22 ), and ethanol (C 2 H 5 OH). Different surface morphologies were observed on the steel surface after laser irradiation, depending on the types of media. A strong relationship was identified between the period of LIPSS and the refractive index of liquid. In addition to the change of LIPSS period, complicated mesh patterns were formed on the surface irradiated in decane and ethanol, indicating the significant effect of thermal conductivity of the liquids on surface formation mechanisms. This study demonstrated the possibility of controlling the period and topography of LIPSS by using different media.

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Direct observations of multi-cyclic nanoindentation-induced phase transformations in single-crystal Ge

Kosai K., Yan J.

Materials Research Express （Materials Research Express）  6 （ 7 ）  2019年04月

　概要を見る

© 2019 IOP Publishing Ltd. Multi-cyclic nanoindentation experiments with various holding loads were carried out on single-crystal Ge to investigate pressure-induced phase transformation behaviors. Cross-sectional transmission electron microscopic observation and laser micro-Raman spectroscopy of the indents revealed various phase transformation behaviors at different holding loads. Distinctive phase transformation behaviors were observed under various loading and unloading conditions. With a low holding load, a broad phase transformed region containing r8-Ge phase and dislocations was generated. A middle holding load promoted twinning but limited phase transformations. On the other hand, a densely transformed region containing dc-Ge, a-Ge, r8-Ge and st12-Ge was widely formed at a high holding load. In addition, the calculation results of the average contact pressure in the last unloading step verified the occurrence of these phase transformations. By integrating these results, a path diagram for phase transformations of single-crystal Ge during multi-cyclic nanoindentation was established, which is useful for understanding the subsurface damage formation in mechanical processing of the material.

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Investigation on wear modes and mechanisms of abrasive belts in grinding of U71Mn steel

Z. He, J. Li, Y. Liu, J. Yan

International Journal of Advanced Manufacturing Technology （International Journal of Advanced Manufacturing Technology）  101 （ 5-8 ） 1821 - 1835 2019年04月

研究論文（学術雑誌）, 共著, 査読有り,  ISSN  02683768

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© 2018, Springer-Verlag London Ltd., part of Springer Nature. We investigated the wear modes and mechanisms of alumina grits during abrasive belt grinding of U71Mn steel under various normal forces and grinding speeds. Our approach consisted of an experimental procedure that produced sufficient wear followed by a resin-embedding method for observing the cross sections and topographies of grits. Statistics of wear modes and protrusion heights were calculated to visualize and quantify abrasive belt wear. The results demonstrated that different subsurface structures emerged inside the worn grits, and these structures were sensitive to process parameters. Transitions between abrasion and fracture wear modes were frequently observed. The effects of abrasive belt wear and process parameters on wear modes were clarified. The critical protrusion height of the abrasive belts for each wear mode of abrasive grits was experimentally determined.

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炭素拡散反応を用いた形彫り放電加工による多結晶ダイヤモンドの3次元形状創製

笠井慎平，袖平智樹，閻 紀旺

電気加工学会誌 53 （ 132 ） 5 - 11 2019年03月

研究論文（学術雑誌）, 共著, 査読有り

Ultrasonic vibration-assisted microgrinding of glassy carbon

P. Beiring, J. Yan

Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science （Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science）  233 （ 12 ） 1 - 11 2019年03月

研究論文（学術雑誌）, 共著, 査読有り,  ISSN  09544062

　概要を見る

© IMechE 2019. Glassy carbon is an amorphous material which, due to its unique material properties, has recently been introduced to micro/nanoimprinting as mold substrates. However, since glassy carbon is a hard, brittle, and highly elastic material, the precision machining of micro/nanostructures on it remains a challenging task. In this research, ultrasonic vibration-assisted microgrinding was proposed for ductile machining of glassy carbon. To find suitable conditions, the effects of ultrasonic vibration assistance and tool inclination were investigated. The results showed that by utilizing ultrasonic vibration assistance and tool inclination, a ductile response was achieved with improved surface roughness. In addition, the periodical waviness of the groove edge due to material elastic recovery was successfully prevented. This study provided an insight into the kinematics in ultrasonic vibration-assisted grinding of a highly elastic, hard, and brittle material.

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多結晶ダイヤモンド円盤工具を用いた単結晶SiCの放電研削複合加工

黒澤智子，閻 紀旺

電気加工学会誌 53 （ 132 ） 12 - 18 2019年03月

研究論文（学術雑誌）, 共著, 査読有り

Laser recovery of grinding-induced subsurface damage in the edge and notch of a single-crystal silicon wafer

K Niitsu, Y Tayama, T Kato, J. Yan

Surface Topography: Metrology and Properties （Surface Topography: Metrology and Properties）  7 （ 015013 ） 1 - 13 2019年02月

研究論文（学術雑誌）, 共著, 査読有り

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© 2019 IOP Publishing Ltd. The edges and notches of silicon wafers are usually machined by diamond grinding, and the grinding-induced subsurface damage causes wafer breakage and particle contamination problems. However, the edge and notch surfaces have large curvature and sharp corners, thus it is difficult to be finished by chemo-mechanical polishing. In this study, a nanosecond pulsed Nd:YAG laser was used to irradiate the edge and notch of a boron-doped single-crystal silicon wafer to recover the grinding-induced subsurface damage. The reflection loss and the change of laser fluence when irradiating a curved surface were considered, and the damage recovery behavior was investigated. The surface roughness, crystallinity, and hardness of the laser recovered region were measured by using white light interferometry, laser micro-Raman spectroscopy, and nanoindentation, respectively. The results showed that after laser irradiation the damaged region was recovered to a single-crystal structure with nanometric surface roughness, and the surface hardness was also improved. This study demonstrates that laser recovery is a promising post-grinding process for improving the surface integrity of the edge and notch of silicon wafers.

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Effects of tool rake angle and tool nose radius on surface quality of ultraprecision diamond-turned porous silicon

M. Heidari, J. Akbari, J. Yan

Journal of Manufacturing Processes （Journal of Manufacturing Processes）  37   321 - 331 2019年01月

研究論文（学術雑誌）, 共著, 査読有り,  ISSN  15266125

　概要を見る

© 2018 The Society of Manufacturing Engineers This paper presents an investigation of the effects of tool rake angle and nose radius on the surface quality of ultraprecision diamond-turned porous silicon. The results showed that as rake angle decreases, the high-stress field induced by the tool edge increases, causing microcracks to propagate extensively near the pore walls. As a result, the ductile-machined areas shrank under a negative tool rake angle. On the other hand, brittle fracture occurred around pores released cutting pressure significantly. These trends of rake angle effects are distinctly different from those in the cutting of non-porous silicon. Finite element simulation of stress in the cutting area agreed with the experimental results. The results also indicated that using a tool with a bigger nose radius suppressed brittle fractures around the pore edge and improved surface quality. Raman spectroscopy of the ductile-machined surfaces revealed that the amorphization of the subsurface layer became more significant when decreasing tool rake angle or increasing tool nose radius. By choosing the optimal tool geometry, a high quality surface can be achieved on porous silicon, which demonstrates the capability of the diamond turning process to fabricate high-precision components.

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Investigation of Ultra-Precision Machining on Single Crystal Silicon Using Molecular Dynamics Simulation and Experiments

SN Ameli Kalkhoran, M Vahdati, J Yan

Amirkabir Journal of Mechanical Engineering 52 (3), 731-742 2019年

Single-grain cutting based modeling of abrasive belt wear in cylindrical grinding

He Z., Li J., Liu Y., Yan J.

Friction （Friction）  8 （ 1 ） 208 - 220 2019年

ISSN  22237690

　概要を見る

© 2019, The Author(s). A systematic wear model of the cylindrical grinding process with an alumina abrasive belt from the perspective of single grain sliding wear was established in this study. The model consists of three parts: a single cutting force model derived by applying a stress integration method, a single grain wear height analysis based on the wear rate of alumina, and a grinding mileage prediction of multiple grains with Gaussian distributed protrusion heights. Cutting force, single grain wear height and full-size grinding mileage verification experiments were conducted. The results indicated that the established model was in reasonable agreement with the experimental outcomes, which suggests that this model could be useful in the industry to predict the wear process of abrasive belts.

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Chip morphology and surface integrity in ultraprecision cutting of yttria-stabilized tetragonal zirconia polycrystal

Yan J., Okuuchi T.

CIRP Annals 2019年

ISSN  00078506

　概要を見る

© 2019 Yttria-stabilized tetragonal zirconia polycrystal (Y-TZP) is an important material for dental, biomedical, and mechanical applications. In this study, Y-TZP was cut by a single-crystal diamond tool in the micro-nanometre scale. The chip morphology and machined surface/subsurface properties under various conditions were investigated by scanning electron microscopy, Raman spectroscopy and cross-sectional transmission electron microscopy. Two factors dominating the material removal were identified: (i) crystal grain refinement and (ii) tetragonal-to-monoclinic phase transformation, the mechanisms of which were established by experiments and finite element simulations. This study provides a possible solution to the rapid fabrication of small 3D features on Y-TZP with nanometric surface roughness and an ultra-fine-grained subsurface layer.

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Molecular Dynamics Investigation of Nanometric Cutting of Single-Crystal Silicon Using a Blunt Tool

Ameli Kalkhoran S., Vahdati M., Yan J.

JOM （JOM）  71 （ 12 ） 4296 - 4304 2019年

ISSN  10474838

　概要を見る

© 2019, The Minerals, Metals & Materials Society. A cutting process is strongly affected by depth of cut (h0) and tool edge radius (re), the relationship of which is described by relative tool sharpness (RTS = h0/re). In nanometric cutting, the depth of cut is far smaller than the tool edge radius, thus the tool is actually a very blunt one with a highly negative effective tool rake angle (~ − 90°). However, most previous studies have assumed the tool is extremely sharp with a nanometric edge radius, and to date there is very little literature on the cutting mechanism for a blunt tool (RTS < 1). In this study, the material deformation/removal behavior and forces under a small RTS from 1 to 0 were investigated via molecular dynamics. The results show that the surface integrity and chip formation are strongly affected by RTS. As RTS is reduced to 0.25 or smaller, rubbing and ploughing occur with no material removal. In such a circumstance, the force angle drops sharply with remarkable subsurface damage formation in the workpiece. These findings are distinctly different from the common belief, and provide new information for the optimization of the silicon wafer manufacturing process.

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