Papers - Matsumoto, Yoshinori
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バイナリオプティクスによるネガ型レジストの三次元形状
花井 計，清水 さやか，松本佳宣
電気学会論文誌 E 125 ( 10 ) 424-425 2005.10
Research paper (scientific journal), Joint Work, Accepted
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高アスペクト比立体形状への配線パターン露光法の開発
花井 計，田村 喜朗，松本佳宣
電気学会論文誌 E 125 ( 6 ) 280-281 2005.06
Research paper (conference, symposium, etc.), Joint Work, Accepted
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Magnetic mesa structures fabricated by reactive ion etching with CO/NH3/Xe plasma chemistry for an all-silicon quantum computer
Dong F. Wang, A. Takahashi, Y. Matsumoto, K.M. Itoh, Y. Yamamoto, T. Ono and M. Esashi
Nanotechnology 16 990-994 2005
Research paper (conference, symposium, etc.), Joint Work, Accepted
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グレイスケールリソグラフィと構造体転写を用いた感光材料と樹脂材料の微細３次元加工
RYOUTAROU MORI, KEI HANAI, MATSUMOTO YOSHINORI
電気学会論文誌 E 124 ( 10 ) 359-363 2004.10
Research paper (scientific journal), Joint Work, Accepted
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短距離通信用CMOS集積化光受信器の開発
KEI KUWABARA, MATSUMOTO YOSHINORI
電子情報通信学会論文誌 J87-C ( 4 ) 396-403 2004.04
Research paper (scientific journal), Joint Work, Accepted
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エマルジョングレイスケールマスクの紫外線透過量と感光性ガラスの3次元加工
森 涼太郎、松本 佳宣
電気学会論文誌 E 123 ( 11 ) 499-503 2003.11
Research paper (scientific journal), Joint Work, Accepted
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微小クロムパターンを用いたグレイスケールリソグラフィーの研究
花井 計、松本 佳宣
電気学会論文誌 E 123 ( 10 ) 410-415 2003.10
Research paper (conference, symposium, etc.), Joint Work, Accepted
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無電解めっき法によるガラス貫通配線の形成
中丸 文雄、松本 佳宣
電気学会論文誌 E 123 ( ８ ) 313-314 2003.08
Research paper (conference, symposium, etc.), Joint Work, Accepted
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Damage Free Dicing Method for MEMS Devices
Y. Matsumoto ,Y. Awatani, K. Kato
電気学会論文誌 E 123 ( 7 ) 255-256 2003.07
Research paper (conference, symposium, etc.), Joint Work, Accepted
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グレイスケールマスクを用いたガラスの三次元微細加工技術
鹿又 学、松本 佳宣
電気学会論文誌 E (電気学会) 122 ( １１ ) 531-536 2002.11
Research paper (conference, symposium, etc.), Joint Work
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High efficiency optical coupler for a small photo acceptance area photodiode used in the high speed plastic optical fiber communication
Y. Matsumoto, A. Nakazono, T. Kitahara, Y. Koike
Sensors and Actuators A 97-98 318-322 2002.08
Research paper (conference, symposium, etc.), Joint Work
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Novel high efficiency concentrator for optical fiber communication
F. Nakamaru, Y. Matsumoto, A. Nakazono
IEEE Photonics Technology Letters 14 ( 7, July ) 953-955 2002
Research paper (conference, symposium, etc.), Joint Work
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Novel high efficiency concentrator for optical fiber communication
F. Nakamaru, Y. Matsumoto, A. Nakazono
The 2001 International Conference on Optical MEMS 2001, 125-126 2001.09
Joint Work, Accepted
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グレイスケールマスク製作法とそれを用いた３次元微細加工法
慶應義塾大学 知的資産センター 2001.07
Single Work
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Small and high-sensitive three axis SOI capacitive accelerometer
Y.Yamaguchi, F.Katsumata, M.Nishimura, Y.Matsumoto, M.Ishida
The Transaction of IEEE Japan 121-E ( 7, July ) 362-366 2001.07
Research paper (conference, symposium, etc.), Joint Work
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Novel optical transceiver with compound parabolic concentrator for graded index plastic opticalfiber
Y. Matsumoto, A. Nakazono, T. Kitahara, Y. Koike
The 2001 International Conference on Solid-State Sensor and Actuators 202-205 2001.06
Joint Work, Accepted
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Development and evaluation of capacitance detection ASIC for three-axis capacitive accelerometer
Y. Matsumoto, S. Kawahito, M.Ishida
The Transaction of IEEE Japan 121-E, ( 3, March ) 135-141 2001.03
Research paper (conference, symposium, etc.), Joint Work
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The property of plasma polymerized fluorocarbon film in relation to CH4/C4F8 ratio and substrate temperature
Y. Matsumoto, M. Ishida
Sensors and Actuators A 83 179-185 2000.05
Research paper (conference, symposium, etc.), Joint Work
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Three-axis SOI capacitive accelerometer with PLL C-Vconverter
Y.Matsumoto, M.Nishimura, M.Matsuura,M.Ishida
Sensors and Actuators A 75 77-85 1999.05
Research paper (conference, symposium, etc.), Joint Work
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An Integrated Three-Axis Accelerometer Using CMOS Compatible Stress Sensitive Differential Amplifiers.
H. Takao, Y. Matsumoto, M. Ishida
IEEE Transactions on Electron Devices 46 ( 1 ) 109-116 1999.02
Research paper (conference, symposium, etc.), Joint Work