研究者詳細 - 三木　則尚

論文 - 三木　則尚

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Dynamic Characteristics of a Hydraulic Amplification Mechanism for Large Displacement Actuators Systems

Arouette, X.; Matsumoto, Y.; Ninomiya, T.; Okayama, Y.; Miki, N.

Sensors 10 2946-2956 2010年03月

研究論文（学術雑誌）, 共著, 査読有り

Three-dimensional spheroid-forming lab-on-a-chip using micro-rotational flow

Hiroki Ota, Ryosuke Yamamoto, Koji Deguchi, Yuta Tanaka, Yutaka Kazoe, Yohei Sato, Norihisa Miki

Sensors and Actuators B: Chemical 147 （ 1 ） 359-365 2010年05月

研究論文（学術雑誌）, 共著, 査読有り

Needle-Type in situ Water Content Sensor with Polyethersulfone Polymer Membrane

T. Iwashita, H. Katayanagi, and N. Miki

Sensors and Actuators B: Chemical 154 41-45 2011年05月

研究論文（学術雑誌）, 共著, 査読有り

Fluorescence Imaging Technique of Surface Electrostatic Potential Using Evanescent Wave Illumination

Y. Kazoe, S. Miyakawa, N. Miki, and Y. Sato

Applied Physics Letters 95 （ 23 ） 234104 2009年12月

研究論文（学術雑誌）, 共著, 査読有り

液滴の拡散混合を利用した流れ方向濃度グラジエント生成デバイスの開発

鵜澤　翔平,有賀　啓二,三木　則尚

電気学会E部門誌 130 （ 2 ） 44-52 2010年02月

研究論文（学術雑誌）, 共著, 査読有り

Photochemically induced increase in endothelial permeablity regulated by RhoA activation

Hiroki Ota, Mimiko Matsumura, Norihisa Miki and Haruyuki Minamitami

Photochemical & Photobiological Sciences 8 （ 10 ） 1401-1407 2009年

研究論文（学術雑誌）, 共著, 査読有り

MEMS-based hydraulic displacement amplification mechanism with completely encapsulated liquid

T. Ninomiya, Y. Okayama, Y. Matsumoto, X. Arouette, K. Osawa and N. Miki

Sensors and Actuators A: Physical 166 277-282 2011年03月

研究論文（学術雑誌）, 共著, 査読有り

A multilayered microfilter using PES nano porous membrane applicable as the dialyzer of a wearable artificial kidney

Gu Ye and Norihisa Miki

Journal of Micromechanics and Microengineering 19 065031 (8pp) 2009年06月

研究論文（学術雑誌）, 共著, 査読有り

Site-Selective Deposition of Silver Nanoparticles Using Modified Silver Mirror Reaction and Surface Modification by Self-Assembled Monolayer

K. Hanada, K. Kurooka and N. Miki

Sensors and Materials 21 （ 3 ） 129-139 2009年

研究論文（学術雑誌）, 単著, 査読有り

We developed a set of processes for depositing silver nanoparticles on a glass substrate that involves using a modified silver mirror reaction, whereby dispersants are added to a conventional silver mirror solution. The whole set of processes was completed in 15 minutes in a non-vacuum environment except the cleaning processes with oxygen plasma at 20 Pa and at a low cost. The processes can be applied to the site-selective deposition of silver nanoparticles by modifying the surface characteristics of glass substrates using a self-assembled monolayer (SAM). We used a microcontact printing method that incorporated a non-photolithographic top-down process to pattern a SAM. The proposed processes are readily applicable to promising applications of metal nanoparticles, such as ultrasensitive sensors and catalysts.

WATER-VAPOR PERMEABILITY CONTROL OF PDMS BY THE DISPERSION OF COLLAGEN POWDER

Y. Zhang, M. Ishida, Y. Kazoe, Y. Sato and N. Miki

TEEE：IEEJ Transactions on Electrical and Electronic Engineering 4 （ 2 ） 2009年03月

研究論文（学術雑誌）, 単著, 査読有り

Polydimethylsiloxane (PDMS) has been widely used as a material for µTAS devices due to the superior nature of its manufacturability and chemical resistance, etc. PDMS is known to allow the permeation of gas and water-vapor. This characteristic was applied to ensure an efficient oxygen supply to cells cultivated in micro chambers and power-free sample injection into micro fluidic devices. Some applications, such as long-term experiments with aqueous samples, however, prefer to avert the permeation of water-vapor through PDMS. This paper reports on a new method to control the water-vapor permeability of PDMS by dispersing collagen powder (collagen/PDMS polymer). Firstly, we evaluated the manufacturability and material strength of the collagen/PDMS polymer to see whether the polymer could be employed as a material for µTAS devices. Subsequently, we designed and fabricated micro-fluidic devices to directly measure the amount of water-vapor permeating through a PDMS or collagen/PDMS membrane and evaluated the effect of the dispersed collagen. The use of the dispersed collagen powder successfully reduced the water-vapor permeability of PDMS by 54%.

Gastric-Fluid-Utilizing Micro Battery for Micro Medical Devices

Hikaru Jimbo and Norihisa Miki

Sensers and Actuators B: Chemical 134 （ 1 ） 219-224 2008年08月

研究論文（学術雑誌）, 共著, 査読有り

A variety of micro medical devices have been developed to provide more advanced and less invasive medical treatment. An effective power supply is crucial to the operation of these devices. Currently, two types of power supply are used: small batteries or radio power transmission. However, the former limit the operating time of the devices, while radio power transmission affects other medical devices due to the electromagnetic waves. In this paper, we report on a gastric-fluid-utilizing micro battery (GMB) that utilizes the gastric fluid in the stomach as an electrolyte. The GMB is designed to be used in the stomach and to generate electricity based on the principle of the voltaic cell. It consists only of biocompatible materials, including the electrodes, porous ceramic filter, and polydimethylsiloxane casing. Platinum deposited on a thin glass plate and a zinc plate work as positive and negative electrodes, respectively. Though zinc dissolves during the generation of electricity, it is an essential trace metal for humans and, given the small amount released, is not toxic. The porous ceramic filter placed between the electrodes filters out any foreign materials in the stomach fluid and holds the gastric fluid by capillary attraction. In experiments, GMB successfully generated 1.0 mW (0.42 V, 2.41 mA) with a 200-Ω external load. It generated a stable output voltage of 0.6 V for more than 39 minutes with a 5-kΩ external load. We demonstrated the feasibility of the GMB for medical applications by successfully supplying power to a telemetric system and a tiny DC motor that is commercially available.

Wearable Pupil Position Detection System Utilizing Dye-Sensitized Photovoltaic Devices

T. Shigeoka, T. Muro, T. Ninomiya, and N. Miki

Sensors and Actuators A 145-146 103-108 2008年

研究論文（学術雑誌）, 単著, 査読有り

Detection of the line-of-sight (LOS) has a variety of applications, such as communication tools for elderly or disabled people, assisting drivers,
and effective location of traffic signs. To realize such promising applications, there is strong demand for an LOS detection system that does not
restrict users’ activities and inflicts no mental stress. The LOS can be obtained by combining the directions of the face and eyes, respectively,
where the detection of location and motion of the pupils is a critical technology. In this paper, we propose a novel wearable pupil position detection
system, featuring minimum disturbance to users, both physically and mentally, via the use of dye-sensitized photovoltaic devices. These latter are
transparent and generate voltage according to the incident light intensity. Arraying the devices on wearable eyeglasses, this system detects the
difference in the reflection light from the pupil and the white of the eye and hence determines the position of the pupil. It is wearable as an eyeglass,
meaning it does not disturb users’ activities or eyesight. More importantly, it involves minimal physical and psychological stress. We fabricated
the photovoltaic device and demonstrated their feasibility to determine the location of the pupil.We found it possible to meet the required reaction
time of 100 ms by reducing the size of the device and to improve the accuracy of pupil location detection by arraying the devices.

A microfilter utilizing a polyethersulfone porous membrane with nanopores

Ye Gu and Norihisa Miki

Journal of Micromechanics and Microengineering 17 2308-2315 2007年10月

研究論文（学術雑誌）, 共著

We present a novel microfilter system used for solutes selective separation by molecular sizes of 1~2nm. The microfilter system consists two layers of micro chambers made of PDMS and one piece of porous membrane made of polyethersulfone (PES) by wet phase immersion method. The PES membrane at the centre of the two micro chambers acts as a barrier of molecules larger than its pores. A novel method of bonding the PES membrane to PDMS surface was developed in the device fabrication. Diffusion in the microfilter was derived theoretically and applied in the filtering evaluation. Filtering capacity of this microfilter for molecules with molecular sizes varying from 0.3nm to 8.4nm was evaluated using solution samples of sodium chloride (NaCl) and Fluorescein Isothiocyanate (FITC) Dextrans with molecular weights of 4k, 20k and 70k. The filtering experiments indicated that the optimal membrane used for the device was P2S2 (Table 1). This microfilter system with the optimal PES membrane was believed to be capable for the selective separation at a molecular size barrier of 1~2nm and have a potential for the use in portable hemodialysis systems.

Non-photolithographic Manufacturing Processes for Micro-channels Functioned by Micro-contact-printed

Saigusa H, Suga Y, Miki N

IEEJ Transactions on Sensors and Micromachines 126-E （ 11 ） 603-606 2006年11月

研究論文（学術雑誌）, 単著, 査読有り

微小量のサンプルを効率的に反応させるためには、サンプルの微小液滴をいかにハンドリングするかがキーとなる。本論文では微小液滴を、マイクロ流路表面の表面エネルギ制御により、パッシブに位置決め、移動させる方法を論じている。特に表面エネルギの制御をおこなう、自己組織単分子膜（SAM）のマイクロコンタクトプリントによる局所的転写技術を開発した。

Wafer Bonding Techniques for MEMS

N. Miki

SENSOR LETTERS （American Scientific Publishers） 3 （ 4 ） 263-273 2005年12月

研究論文（学術雑誌）, 単著, 査読有り, ISSN 1546-198X

ウエハボンディング技術は，MEMSにおいてパッケージングや3次元構造の製作において高く期待されており，一部では実用化が始まっている．本論文は，2004年までのウエハボンディング技術に関する研究をまとめた総説である．特に本論文では，ウエハボンディング技術を、直接接合、陽極接合、接着層を用いた接合、および表面活性接合の４つに分類し、それぞれについて解説した。

Effect of nanoscale surface roughness on the bonding energy of direct-bonded silicon wafers

MIKI N and Spearing SM

Journal of Applied Physics （AMER INST PHYSICS） 94 （ 10 ） 6800-6806 2003年11月

研究論文（学術雑誌）, 共著, 査読有り, ISSN 0021-8979

シリコンウエハ接合の性能を決定する要因の一つに，ナノスケールの表面粗さがある．本論文では，表面粗さの評価パラメータとして，表面の一番高い点からある深さまでに含まれる面積を表すBearing Ratioを導入した．適切な深さを選択すると，Bearing Ratioはウエハ接合における両ウエハの接触面積を表す．ウエハ接合の性能は接合エネルギにより定量化され，これは接触面積に比例すると考えられる．薬品により任意の表面粗さをもつウエハを製作し，これらの接合実験によりBearing Ratioと接合エネルギが比例することを示し，ナノスケール表面粗さとウエハ接合の性能を初めて定量的に関連付けた．

Enhancement of rotordynamic performance of high-speed micro-rotors for power MEMS applications by precision deep reactive ion etching

Miki N, Teo CJ, Ho LC, Zhang X

SENSORS AND ACTUATORS A-PHYSICAL （ELSEVIER SCIENCE SA） 104 （ 3 ） 263-267 2003年05月

研究論文（学術雑誌）, 単著, 査読有り, ISSN 0924-4247

高性能Power MEMSデバイスの実現には，微小ロータの高速回転が不可欠である．ロータの回転性能を決定する要因の一つは，ロータのインバランスである．本論文において，ロータのインバランスがDeep Reactive Ion Etchingによる製作プロセスに依存していることを実験から証明した．さらにDRIEプロセスを最適化することにより，ロータのインバランスを軽減し，回転性能が向上することを示した．

Soft-magnetic rotational microwings in an alternating magnetic field applicable to microflight mechanisms

Miki N, Shimoyama I

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS （IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC） 12 （ 2 ） 221-227 2003年04月

研究論文（学術雑誌）, 共著, 査読有り, ISSN 1057-7157

微小機構の飛行には，外部場からのエネルギ供給が有効であり，外部交流磁場により回転する磁性体回転翼はその条件を満たす．磁性体材料としてMEMS製作技術により成膜が容易，かつ姿勢制御にも利用可能な軟磁性体が優れている．回転中の磁性体翼のダイナミクスを実験，計算を通じて解析した．また微小回転翼の飛行特性を評価し，微小飛行機構への応用可能性を示した．

Multi-stack silicon-direct wafer bonding for 3D MEMS manufacturing

Miki N, Zhang X, Khanna R, Ayon AA, Ward D, Spearing SM

SENSORS AND ACTUATORS A-PHYSICAL （ELSEVIER SCIENCE SA） 103 （ 1-2 ） 194-201 2003年01月

研究論文（学術雑誌）, 単著, 査読有り, ISSN 0924-4247

Preliminary development of a hydrocarbon-fueled catalytic micro-combustor

Spadaccini CM, Zhang X, Cadou CP, Miki N, Waitz IA

SENSORS AND ACTUATORS A-PHYSICAL （ELSEVIER SCIENCE SA） 103 （ 1-2 ） 219-224 2003年01月

研究論文（学術雑誌）, 共著, 査読有り, ISSN 0924-4247

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