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所属(所属キャンパス)
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理工学部 (三田)
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職名
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名誉教授
Toshiaki Makabe received his BSc, MSc, and PhD degrees in electrical engineering all from Keio University, and he became a Professor of EEE at Keio University in 1991. He served as a guest professor at POSTECH, Ruhr University Bochum, and Xi’an Jiaotong University. He was the Dean of the Faculty of Science and Technology from 2007 to 2009. He served as the Vice-President of Keio in charge of research between 2009 and 2017. He was appointed to the Representative for International Affairs of the Research University 11 of Japan in 2017. Now he is a Professor Emeritus at Keio University and Emeritus member of Japan Society of Applied Physics (JSAP). He has published more than 170 papers in peer-reviewed int. journals, and has given invited-talks at more than 90 int. conferences on non-equilibrium plasmas, related basic transport theory, and surface processes. In 1988, he had his opportunity to present his original Relaxation-ConTinuum (RCT) model for a low-temperature, radio-frequency (RF) plasma simulation. Direct numerical procedure (DNP) of the Boltzmann equation was proposed to study the velocity distribution and the transport of electrons in RF-fields in 1994. Robot-assisted spatiotemporal optical emission spectroscopy, i.e. computerized-tomography (CT) was developed in RF plasmas. In 2000, he integrated his modeling into “Vertically Integrated CAD for Device Processing” (VicAddress) for feature profile prediction. His study of a non-equilibrium radiofrequency plasma interacting with a surface was collected into the special issue, “80 Years of Plasma” in PSST (2009). He has authored many books, including Plasma Electronics: Applications in Microelectronic Device Fabrication (2nd edition) published by CRC Taylor & Francis Group (2014). He was on the Editorial Board of PSST and JPD, and was a guest editor of special issues in JJAP, Aust. J. Phys., JVST-A, IEEE Tran. PS, and Appl. Surf. Sci. He received the awards “Fluid Science Prize” in 2003 from the Institute of Fluid Science (Tohoku Univ.); “Plasma Electronics Prize” in 2004 from the JSAP; “Plasma Prize” in 2006 from the American Vacuum Society; “DPS Nishizawa Award” in 2017 from the JSAP, and “Will Allis Prize” in 2022 from the American Physical Society, for his “Pioneering contributions to the modeling and diagnostics as applied to plasma science and technology.” He is a foreign member of the Serbian Academy of Sciences and Arts (2013-). He is an elected Fellow of the Institute of Physics (UK), the American Vacuum Society (US), and the Japan Society of Applied Physics, etc.
慶應義塾大学工学部 ,助手
慶應義塾大学工学部 ,専任講師
慶應義塾大学理工学部 ,助教授
兼慶應義塾大学理工学部電気工学科 ,学習指導副主任
兼慶應義塾大学理工学部(基礎系) ,学習指導副主任
慶應義塾大学, 工学部, 電気工学科
大学, 卒業
慶應義塾大学, 工学研究科, 電気工学専攻
大学院, 修了, 修士
慶應義塾大学, 工学研究科, 電気工学専攻
大学院, 単位取得退学, 博士
Plasma Electronics: Applications in Microelectronic Device Fabrication (2nd edition)
Toshiaki Makabe and Zoran Petrovic, CRC Press (Boca, London, New York), 2014年
Plasma Electronics: Applications in Microelectronic Device Fabrication
Toshiaki Makabe and Zoran Petrovic, Taylor & Francis (New York, London), 2006年
確率過程
真壁 利明,中川 正雄, 培風館, 2002年04月
Advannces in Low Temperature rf-Plasmas: Basis for process design
Toshiaki Makabe, Edited, Elsevier (Amsterdam), 2002年
プラズマエレクトロニクス
真壁 利明, 培風館, 1999年06月
Historical development of electron swarm physics based on the Boltzmann equation towards in-depth understanding of a low-temperature collisional plasma (Topical Review)
T. Makabe and H. Sugawara
Plasma Sources Sci. Technol. 33 093001 (23pp) 2024年09月
研究論文(学術雑誌), 共著, 査読有り
Current status and new insights about the capacitively coupled electronegative plasma source: injection of energetic beam-like electrons to electrode
Toshiaki Makabe
J. Phys. D. 56 045203 (17pp) 2023年01月
研究論文(学術雑誌), 単著, 査読有り
Sustainability of active bulk plasma with high electronegativity in capacitive high frequency plasma
Toshiaki Makabe
Jap. J. Appl. Phys. 61 026002(6pp) 2022年02月
研究論文(学術雑誌), 単著, 査読有り
Review and current status: E-H mode transition in low-temperature ICP and related electron dynamics (Topical Review)
Toshiaki Makabe
Plasma Sources Sci. Technol. 30 023001(16pp) 2021年02月
研究論文(学術雑誌), 単著, 査読有り
Current status and nature of high-frequency electronegative plasmas: basis for material processing in device manufacturing (Invited Review)
Toshiaki Makabe
Jap. J. Appl. Phys. 58 110101(21pp) 2019年11月
研究論文(学術雑誌), 単著, 査読有り
More than 500 oral / poster presentations have been made at international or local conferences hosted by JSAP, GEC(APS), ICRP, AVS, EPS, ICPIG, ESCAMPIG, IEEE-PS, and SPIG, etc., and at specialized workshops and symposia.
Will Allis Prize for the Study of Ionized Gases
Toshiaki Makabe, 2021年10月, American Physical Society, "Ground-breaking development of novel computational methods, and for leading seminal experimental investigations of low temperature plasmas and their applications"
受賞区分: 国内外の国際的学術賞
DPS Nishizawa Award
Toshiaki Makabe, 2017年11月, Int. Symposium on Dry Process, Japan Society of Applied Physics, Outstanding contribution to modeling of plasma etching.
受賞区分: 国内外の国際的学術賞
Fellow of JFES
Toshiaki Makabe, 2012年04月, The Japan Federation of Engineering Societies
受賞区分: 国内外の国際的学術賞
Foreign member of the Serbian Academy of Science and Arts
Toshiaki Makabe, 2009年11月, Serbian Academy of Science and Arts, Outstanding contribution to Plasma Physics
受賞区分: 国内外の国際的学術賞
Fellow of AVS
Toshiaki Makabe, 2008年, American Vacuum Society, Outstanding and sustained contributions to plasma modeling, simulation and diagnostics.
受賞区分: 国内外の国際的学術賞
電子物理
慶應義塾大学
応用確率論 (Introduction to stochastic processes)
慶應義塾大学
プラズマエレクトロニクス
慶應義塾大学
Plasma Electronics
Xian Jiaotong University
Plasma Electronics
Ruhr University Bohum
確率過程 (培風館)
, 教科書・教材の開発
プラズマエレクトロニクス (培風館)
, 教科書・教材の開発
理工学基礎 確率過程 -確率の基礎からランダム・プロセスまで- (培風館)
, 教科書・教材の開発
文科省科学技術・学術審議会
NEDO 研究評価委員会
日本学術振興会
文科省科学技術政策研究所
産業構造審議会臨時委員
応用物理学会,
ドライプロセスシンポジウム,
米国真空学会,
日本物理学会,
電気学会,
Journal Editorial, Plasma Sources Science and Technology
Journal Editorial, Journal of Physics D: Applied Physics
Guest Editor, Applied Surface Science
Guest Editor, Applied Surface Science
Journal Editorial, Japan Society Applied Physics International