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Affiliation
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Faculty of Science and Technology (Mita)
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Position
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Professor Emeritus
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External Links
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Makabe, Toshiaki
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Profile 【 Display / hide 】
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Toshiaki Makabe received his BSc, MSc, and PhD degrees in electrical engineering all from Keio University, and he became a Professor of EEE at Keio University in 1991. He served as a guest professor at POSTECH, Ruhr University Bochum, and Xi’an Jiaotong University. He was the Dean of the Faculty of Science and Technology from 2007 to 2009. He served as the Vice-President of Keio in charge of research between 2009 and 2017. He was appointed to the Representative for International Affairs of the Research University 11 of Japan in 2017. Now he is a Professor Emeritus at Keio University and Emeritus member of Japan Society of Applied Physics (JSAP). He has published more than 170 papers in peer-reviewed int. journals, and has given invited-talks at more than 90 int. conferences on non-equilibrium plasmas, related basic transport theory, and surface processes. In 1988, he had his opportunity to present his original Relaxation-ConTinuum (RCT) model for a low-temperature, radio-frequency (RF) plasma simulation. Direct numerical procedure (DNP) of the Boltzmann equation was proposed to study the velocity distribution and the transport of electrons in RF-fields in 1994. Robot-assisted spatiotemporal optical emission spectroscopy, i.e. computerized-tomography (CT) was developed in RF plasmas. In 2000, he integrated his modeling into “Vertically Integrated CAD for Device Processing” (VicAddress) for feature profile prediction. His study of a non-equilibrium radiofrequency plasma interacting with a surface was collected into the special issue, “80 Years of Plasma” in PSST (2009). He has authored many books, including Plasma Electronics: Applications in Microelectronic Device Fabrication (2nd edition) published by CRC Taylor & Francis Group (2014). He was on the Editorial Board of PSST and JPD, and was a guest editor of special issues in JJAP, Aust. J. Phys., JVST-A, IEEE Tran. PS, and Appl. Surf. Sci. He received the awards “Fluid Science Prize” in 2003 from the Institute of Fluid Science (Tohoku Univ.); “Plasma Electronics Prize” in 2004 from the JSAP; “Plasma Prize” in 2006 from the American Vacuum Society; “DPS Nishizawa Award” in 2017 from the JSAP, and “Will Allis Prize” in 2022 from the American Physical Society, for his “Pioneering contributions to the modeling and diagnostics as applied to plasma science and technology.” He is a foreign member of the Serbian Academy of Sciences and Arts (2013-). He is an elected Fellow of the Institute of Physics (UK), the American Vacuum Society (US), and the Japan Society of Applied Physics, etc.
Career 【 Display / hide 】
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1975.04-1979.03
慶應義塾大学工学部 ,助手
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1979.04-1984.03
慶應義塾大学工学部 ,専任講師
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1984.04-1991.03
慶應義塾大学理工学部 ,助教授
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1985.04-1987.03
兼慶應義塾大学理工学部電気工学科 ,学習指導副主任
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1988.06-1990.09
兼慶應義塾大学理工学部（基礎系） ,学習指導副主任
Academic Background 【 Display / hide 】
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1970.03
Keio University, Faculty of Engineering, 電気工学科
University, Graduated
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1972.03
Keio University, Graduate School, Division of Engineering, 電気工学専攻
Graduate School, Completed, Master's course
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1975.03
Keio University, Graduate School, Division of Engineering, 電気工学専攻
Graduate School, Withdrawal after completion of doctoral course requirements, Doctoral course
Books 【 Display / hide 】
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Plasma Electronics: Applications in Microelectronic Device Fabrication (2nd edition)
Toshiaki Makabe and Zoran Petrovic, CRC Press (Boca, London, New York), 2014
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Plasma Electronics: Applications in Microelectronic Device Fabrication
Toshiaki Makabe and Zoran Petrovic, Taylor & Francis (New York, London), 2006
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確率過程
真壁 利明，中川 正雄, 培風館, 2002.04
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Advannces in Low Temperature rf-Plasmas: Basis for process design
Toshiaki Makabe, Edited, Elsevier (Amsterdam), 2002
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プラズマエレクトロニクス
真壁 利明, 培風館, 1999.06
Papers 【 Display / hide 】
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Historical development of electron swarm physics based on the Boltzmann equation towards in-depth understanding of a low-temperature collisional plasma (Topical Review)
T. Makabe and H. Sugawara
Plasma Sources Sci. Technol. 33 093001 (23pp) 2024.09
Research paper (scientific journal), Joint Work, Accepted
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Current status and new insights about the capacitively coupled electronegative plasma source: injection of energetic beam-like electrons to electrode
Toshiaki Makabe
J. Phys. D. 56 045203 (17pp) 2023.01
Research paper (scientific journal), Single Work, Accepted
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Sustainability of active bulk plasma with high electronegativity in capacitive high frequency plasma
Toshiaki Makabe
Jap. J. Appl. Phys. 61 026002(6pp) 2022.02
Research paper (scientific journal), Single Work, Accepted
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Review and current status: E-H mode transition in low-temperature ICP and related electron dynamics (Topical Review)
Toshiaki Makabe
Plasma Sources Sci. Technol. 30 023001(16pp) 2021.02
Research paper (scientific journal), Single Work, Accepted
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Current status and nature of high-frequency electronegative plasmas: basis for material processing in device manufacturing (Invited Review)
Toshiaki Makabe
Jap. J. Appl. Phys. 58 110101(21pp) 2019.11
Research paper (scientific journal), Single Work, Accepted
Papers, etc., Registered in KOARA 【 Display / hide 】
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Have I succeeded in 'achieving fleeting happiness' in life?
Makabe, Toshiaki
Newsletter (慶應義塾大学グローバルCOEプログラム論理と感性の先端的教育研究拠点) 10 1 - 2 2009.12
Presentations 【 Display / hide 】
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More than 500 oral / poster presentations have been made at international or local conferences hosted by JSAP, GEC(APS), ICRP, AVS, EPS, ICPIG, ESCAMPIG, IEEE-PS, and SPIG, etc., and at specialized workshops and symposia.
2010
Awards 【 Display / hide 】
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Will Allis Prize for the Study of Ionized Gases
Toshiaki Makabe, 2021.10, American Physical Society, "Ground-breaking development of novel computational methods, and for leading seminal experimental investigations of low temperature plasmas and their applications"
Type of Award： International academic award (Japan or overseas)
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DPS Nishizawa Award
Toshiaki Makabe, 2017.11, Int. Symposium on Dry Process, Japan Society of Applied Physics, Outstanding contribution to modeling of plasma etching.
Type of Award： International academic award (Japan or overseas)
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Fellow of JFES
Toshiaki Makabe, 2012.04, The Japan Federation of Engineering Societies
Type of Award： International academic award (Japan or overseas)
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Foreign member of the Serbian Academy of Science and Arts
Toshiaki Makabe, 2009.11, Serbian Academy of Science and Arts, Outstanding contribution to Plasma Physics
Type of Award： International academic award (Japan or overseas)
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Fellow of AVS
Toshiaki Makabe, 2008, American Vacuum Society, Outstanding and sustained contributions to plasma modeling, simulation and diagnostics.
Type of Award： International academic award (Japan or overseas)
Courses Previously Taught 【 Display / hide 】
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電子物理
Keio University
2012.04-2013.03 -
Introduction to stochastic processes
Keio University
2012.04-2013.03 -
プラズマエレクトロニクス
Keio University
2012.04-2013.03 -
Plasma Electronics
Xian Jiaotong University
2010.04-2011.03 -
Plasma Electronics
Ruhr University Bohum
2006.04-2007.03
Educational Activities and Special Notes 【 Display / hide 】
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確率過程 (培風館)
2002.04, Development of Textbook and Teaching Material
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プラズマエレクトロニクス (培風館)
1999.07, Development of Textbook and Teaching Material
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理工学基礎 確率過程 -確率の基礎からランダム・プロセスまで- (培風館)
1987.01, Development of Textbook and Teaching Material
Social Activities 【 Display / hide 】
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文科省科学技術・学術審議会
2004.02-2008.01 -
NEDO 研究評価委員会
2004.02-2004.08 -
日本学術振興会
2004.01-2005.12 -
文科省科学技術政策研究所
2003-2005 -
産業構造審議会臨時委員
2002.01-2003.01
Memberships in Academic Societies 【 Display / hide 】
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応用物理学会,
1984.08-Present -
ドライプロセスシンポジウム,
2003-Present -
米国真空学会,
1989-2020 -
日本物理学会,
1972-2000 -
電気学会,
1970-2000
Committee Experiences 【 Display / hide 】
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2000.08-2015
Journal Editorial, Plasma Sources Science and Technology
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2001-2007
Journal Editorial, Journal of Physics D: Applied Physics
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2002
Guest Editor, Applied Surface Science
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2007
Guest Editor, Applied Surface Science
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2004-2006
Journal Editorial, Japan Society Applied Physics International