Makabe, Toshiaki

写真a

Affiliation

Faculty of Science and Technology (Mita)

Position

Professor Emeritus

External Links

Profile 【 Display / hide

  • Toshiaki Makabe received his BSc, MSc, and PhD degrees in electrical engineering all from Keio University, and he became a Professor of EEE at Keio University in 1991. He served as a guest professor at POSTECH, Ruhr University Bochum, and Xi’an Jiaotong University. He was the Dean of the Faculty of Science and Technology from 2007 to 2009. He served as the Vice-President of Keio in charge of research between 2009 and 2017. He was appointed to the Representative for International Affairs of the Research University 11 of Japan in 2017. Now he is a Professor Emeritus at Keio University and Emeritus member of Japan Society of Applied Physics (JSAP). He has published more than 170 papers in peer-reviewed int. journals, and has given invited-talks at more than 90 int. conferences on non-equilibrium plasmas, related basic transport theory, and surface processes. In 1988, he had his opportunity to present his original Relaxation-ConTinuum (RCT) model for a low-temperature, radio-frequency (RF) plasma simulation. Direct numerical procedure (DNP) of the Boltzmann equation was proposed to study the velocity distribution and the transport of electrons in RF-fields in 1994. Robot-assisted spatiotemporal optical emission spectroscopy, i.e. computerized-tomography (CT) was developed in RF plasmas. In 2000, he integrated his modeling into “Vertically Integrated CAD for Device Processing” (VicAddress) for feature profile prediction. His study of a non-equilibrium radiofrequency plasma interacting with a surface was collected into the special issue, “80 Years of Plasma” in PSST (2009). He has authored many books, including Plasma Electronics: Applications in Microelectronic Device Fabrication (2nd edition) published by CRC Taylor & Francis Group (2014). He was on the Editorial Board of PSST and JPD, and was a guest editor of special issues in JJAP, Aust. J. Phys., JVST-A, IEEE Tran. PS, and Appl. Surf. Sci. He received the awards “Fluid Science Prize” in 2003 from the Institute of Fluid Science (Tohoku Univ.); “Plasma Electronics Prize” in 2004 from the JSAP; “Plasma Prize” in 2006 from the American Vacuum Society; “DPS Nishizawa Award” in 2017 from the JSAP, and “Will Allis Prize” in 2022 from the American Physical Society, for his “Pioneering contributions to the modeling and diagnostics as applied to plasma science and technology.” He is a foreign member of the Serbian Academy of Sciences and Arts (2013-). He is an elected Fellow of the Institute of Physics (UK), the American Vacuum Society (US), and the Japan Society of Applied Physics, etc.

Career 【 Display / hide

  • 1975.04
    -
    1979.03

    慶應義塾大学工学部 ,助手

  • 1979.04
    -
    1984.03

    慶應義塾大学工学部 ,専任講師

  • 1984.04
    -
    1991.03

    慶應義塾大学理工学部 ,助教授

  • 1985.04
    -
    1987.03

    兼慶應義塾大学理工学部電気工学科 ,学習指導副主任

  • 1988.06
    -
    1990.09

    兼慶應義塾大学理工学部(基礎系) ,学習指導副主任

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Academic Background 【 Display / hide

  • 1970.03

    Keio University, Faculty of Engineering, 電気工学科

    University, Graduated

  • 1972.03

    Keio University, Graduate School, Division of Engineering, 電気工学専攻

    Graduate School, Completed, Master's course

  • 1975.03

    Keio University, Graduate School, Division of Engineering, 電気工学専攻

    Graduate School, Withdrawal after completion of doctoral course requirements, Doctoral course

Academic Degrees 【 Display / hide

  • 工学 , Keio University, 1978.03

 

Books 【 Display / hide

  • Plasma Electronics: Applications in Microelectronic Device Fabrication (2nd edition)

    Toshiaki Makabe and Zoran Petrovic, CRC Press (Boca, London, New York), 2014

  • Plasma Electronics: Applications in Microelectronic Device Fabrication

    Toshiaki Makabe and Zoran Petrovic, Taylor & Francis (New York, London), 2006

  • 確率過程

    真壁 利明,中川 正雄, 培風館, 2002.04

  • Advannces in Low Temperature rf-Plasmas: Basis for process design

    Toshiaki Makabe, Edited, Elsevier (Amsterdam), 2002

  • プラズマエレクトロニクス

    真壁 利明, 培風館, 1999.06

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Papers 【 Display / hide

  • Historical development of electron swarm physics based on the Boltzmann equation towards in-depth understanding of a low-temperature collisional plasma (Topical Review)

    T. Makabe and H. Sugawara

    Plasma Sources Sci. Technol. 33   093001 (23pp) 2024.09

    Research paper (scientific journal), Joint Work, Accepted

  • Current status and new insights about the capacitively coupled electronegative plasma source: injection of energetic beam-like electrons to electrode

    Toshiaki Makabe

    J. Phys. D. 56    045203 (17pp)  2023.01

    Research paper (scientific journal), Single Work, Accepted

  • Sustainability of active bulk plasma with high electronegativity in capacitive high frequency plasma

    Toshiaki Makabe

    Jap. J. Appl. Phys. 61   026002(6pp) 2022.02

    Research paper (scientific journal), Single Work, Accepted

  • Review and current status: E-H mode transition in low-temperature ICP and related electron dynamics (Topical Review)

    Toshiaki Makabe

    Plasma Sources Sci. Technol. 30   023001(16pp) 2021.02

    Research paper (scientific journal), Single Work, Accepted

  • Current status and nature of high-frequency electronegative plasmas: basis for material processing in device manufacturing (Invited Review)

    Toshiaki Makabe

    Jap. J. Appl. Phys. 58   110101(21pp) 2019.11

    Research paper (scientific journal), Single Work, Accepted

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Papers, etc., Registered in KOARA 【 Display / hide

Presentations 【 Display / hide

  • More than 500 oral / poster presentations have been made at international or local conferences hosted by JSAP, GEC(APS), ICRP, AVS, EPS, ICPIG, ESCAMPIG, IEEE-PS, and SPIG, etc., and at specialized workshops and symposia.

    2010

Awards 【 Display / hide

  • Will Allis Prize for the Study of Ionized Gases

    Toshiaki Makabe, 2021.10, American Physical Society, "Ground-breaking development of novel computational methods, and for leading seminal experimental investigations of low temperature plasmas and their applications"

    Type of Award: International academic award (Japan or overseas)

  • DPS Nishizawa Award

    Toshiaki Makabe, 2017.11, Int. Symposium on Dry Process, Japan Society of Applied Physics, Outstanding contribution to modeling of plasma etching.

    Type of Award: International academic award (Japan or overseas)

  • Fellow of JFES

    Toshiaki Makabe, 2012.04, The Japan Federation of Engineering Societies

    Type of Award: International academic award (Japan or overseas)

  • Foreign member of the Serbian Academy of Science and Arts

    Toshiaki Makabe, 2009.11, Serbian Academy of Science and Arts, Outstanding contribution to Plasma Physics

    Type of Award: International academic award (Japan or overseas)

  • Fellow of AVS

    Toshiaki Makabe, 2008, American Vacuum Society, Outstanding and sustained contributions to plasma modeling, simulation and diagnostics.

    Type of Award: International academic award (Japan or overseas)

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Courses Previously Taught 【 Display / hide

  • 電子物理

    Keio University

    2012.04
    -
    2013.03

  • Introduction to stochastic processes

    Keio University

    2012.04
    -
    2013.03

  • プラズマエレクトロニクス

    Keio University

    2012.04
    -
    2013.03

  • Plasma Electronics

    Xian Jiaotong University

    2010.04
    -
    2011.03

  • Plasma Electronics

    Ruhr University Bohum

    2006.04
    -
    2007.03

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Educational Activities and Special Notes 【 Display / hide

  • 確率過程 (培風館)

    2002.04

    , Development of Textbook and Teaching Material

  • プラズマエレクトロニクス (培風館)

    1999.07

    , Development of Textbook and Teaching Material

  • 理工学基礎 確率過程 -確率の基礎からランダム・プロセスまで- (培風館)

    1987.01

    , Development of Textbook and Teaching Material

 

Social Activities 【 Display / hide

  • 文科省科学技術・学術審議会

    2004.02
    -
    2008.01
  • NEDO 研究評価委員会

    2004.02
    -
    2004.08
  • 日本学術振興会

    2004.01
    -
    2005.12
  • 文科省科学技術政策研究所

    2003
    -
    2005
  • 産業構造審議会臨時委員

    2002.01
    -
    2003.01

Memberships in Academic Societies 【 Display / hide

  • 応用物理学会, 

    1984.08
    -
    Present
  • ドライプロセスシンポジウム, 

    2003
    -
    Present
  • 米国真空学会, 

    1989
    -
    2020
  • 日本物理学会, 

    1972
    -
    2000
  • 電気学会, 

    1970
    -
    2000

Committee Experiences 【 Display / hide

  • 2000.08
    -
    2015

    Journal Editorial, Plasma Sources Science and Technology

  • 2001
    -
    2007

    Journal Editorial, Journal of Physics D: Applied Physics

  • 2002

    Guest Editor, Applied Surface Science

  • 2007

    Guest Editor, Applied Surface Science

  • 2004
    -
    2006

    Journal Editorial, Japan Society Applied Physics International

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