論文 - 高橋　英俊

A piezoelectric cantilever-type differential pressure sensor for a low standby power trigger switch

Y Tomimatsu, H Takahashi, T Kobayashi, K Matsumoto, I Shimoyama, ...

Journal of Micromechanics and Microengineering 23 (12), 125023 （Journal of Micromechanics and Microengineering）  23 （ 12 ） 125023 2013年

共著, 査読有り,  ISSN  09601317

　概要を見る

This paper describes a piezoelectric differential pressure sensor using a cantilevered structure with dimensions of 1500 × 1000 × 2 μm 3. A high degree of sensitivity is achieved without the power supply because only the base part of the cantilever is fixed and the piezoelectric material is used as a sensing element. The measurements indicate that the fabricated cantilever bends and a piezoelectric voltage was generated matching the piezoelectric theory for when a differential pressure is applied. The sensitivity to the applied differential pressure was 2.4 mV Pa-1 for a range between -30 Pa and 30 Pa. Additionally, it was also demonstrated that the sensor performs as a wake-up switch during the pressure shifts of 10 Pa with low-power consumption. © 2013 IOP Publishing Ltd.

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A piezoelectric cantilever with a Helmholtz resonator as a sound pressure sensor

Y Tomimatsu, H Takahashi, T Kobayashi, K Matsumoto, I Shimoyama, ...

Journal of Micromechanics and Microengineering 23 (11), 114003 2013年

A photoresponse-compensated parallel piezoresistive cantilever for cellular force measurements

UG Jung, K Kuwana, Y Ajiki, H Takahashi, T Kan, Y Takei, K Noda, ...

Journal of Micromechanics and Microengineering 23 (4), 045015 23 （ 4 ） 045015 2013年

研究論文（学術雑誌）, 共著, 査読有り,  ISSN  0960-1317

　概要を見る

This paper describes a parallel piezoresistive cantilever that is composed of a force-sensing cantilever in addition to a reference cantilever for photoresponse compensation. Piezoresistive cantilevers have been applied in many cellular mechanical measurement studies because of their high sensitivity, high time resolution and ease of handling. However, the electrical resistance changes in response to the excitation light of the fluorescence microscope, which affects the cell measurements. We measured the I-V characteristics of a piezoresistive layer. These photoresponses occurred due to the internal photoelectric effect. We canceled the photoresponses using the reference cantilever. This paper demonstrates compensation of the cantilever photoresponse under irradiation at different angles, wavelengths and light intensities. As a result, the photoresponse could be decreased by 87%. © 2013 IOP Publishing Ltd.

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A barometric pressure sensor based on the air-gap scale effect in a cantilever

N Minh-Dung, H Takahashi, T Uchiyama, K Matsumoto, I Shimoyama

Applied Physics Letters 103 (14), 143505 （Applied Physics Letters）  103 （ 14 ） 143505 2013年

共著, 査読有り,  ISSN  00036951

　概要を見る

The most common structure for a conventional barometric pressure sensor consists of a vacuum-sealed cavity and a diaphragm. However, we hypothesize that a simple structure with an unsealed cavity and an ultra-thin cantilever can provide more sensitive measurements. We produced a 300-nm-thick cantilever with a small spring constant, which made the cantilever sensitive to low pressures. We demonstrated that miniaturizing the air-gap of the cantilever enables the sensor to measure barometric pressure changes at a low pressure change rate with a high resolution, which was 1 Pa at 0.05 Hz, and for a gap size of 1.7 μm. © 2013 AIP Publishing LLC.

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3P172 マイクロピラーアレイ上で成長したフィブロブラスト細胞の大きさと形状 (12. 細胞生物的課題, ポスター, 日本生物物理学会年会第 51 回 (2013 年度))

T Tsukagoshi, G Jung Uijin, H Takahashi, T Kan, K Matsumoto, ...

生物物理 53 (1), S240 2013年

3-axis fingertip force during playing the string instrument

M Hori, M Hosono, H Takahashi, K Matsumoto, I Shimoyama

2013 Transducers & Eurosensors XXVII: The 17th International Conference on … （2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013）     2745 - 2748 2013年

ISSN  9781467359818

　概要を見る

In this paper, we propose a measurement method of 3-axis fingertip force which works when playing a string instrument. A small and thin 3-axis tactile sensor was fabricated to attach to the first finger. The force sensing elements were formed within 1 mm×1 mm on the sensor chip, and the thickness of the sensor was 3 mm. A guitar was used as a string instrument. Using the proposed method, the 3-axis fingertip force was measured in two cases; (a) when the guitar string was held down incorrectly; (b) when the guitar string was held down properly. The data of the 3-axis tactile sensor and the guitar sound were recorded simultaneously. Comparing both cases, it was indicated that the number of the guitar sound's overtone spectra was increased when the string vibration did not propagate through the finger. This proposed method will develop a significant way to analyze the relationship between musicians' fingertip force and instrument sounds. © 2013 IEEE.

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Simultaneous detection of particles and airflow with a MEMS piezoresistive cantilever

H Takahashi, T Kan, K Matsumoto, I Shimoyama

Measurement Science and Technology 24 (2), 025107 （IOP PUBLISHING LTD）  24 （ 2 ） 025107 2013年

研究論文（学術雑誌）, 共著, 査読有り,  ISSN  0957-0233

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This paper describes a particle and airflow sensor using a MEMS piezoresistive cantilever with the dimensions of 250 mu m x 200 mu m x 0.29 mu m. The sensor structure is simple and detects both the airflow velocity and particle collisions by measuring the fractional resistance change due to the cantilever bending. The signals of the airflow velocity and particle collisions can be simultaneously detected by distinguishing continuous and pulse responses. The sensitivity to the airflow velocity was 1.2 x 10(-3) (m/s)(-1) from 0 to 2.5 m s(-1). When a particle of 35 mu m diameter (Lycopodium) collided with the cantilever surface, the fractional resistance change varied with the collision. After the collision, reverberation occurred at 3 kHz, which was the same as the resonance frequency of the cantilever. The magnitude of the fractional resistance changes due to particle collision was proportional to the airflow velocity. The sensitivity to particle collision was 2.0 x 10(-3) (m/s)(-1) when the airflow velocity varied between 0 and 2.5 m s(-1).

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Regional 3-axis plantar forces during stair ascent

M Hori, H Takahashi, A Nakai, K Matsumoto, I Shimoyama

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems … （Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)）     1033 - 1036 2013年

ISSN  10846999

　概要を見る

We proposed the measurement method of plantar force distribution during barefoot walking. 3-axis sensors were fabricated and attached on the sole of the foot. The sensors were so small, light and thin that we were able to measure the forces without interfering in the barefoot condition. Combining these sensors with wireless measurement system, we measured 3-axis plantar force distribution during level walking and stair ascent (Fig. 1). From these measurement results, we calculated zero moment point (ZMP): important index of robot walking. These results indicate that the proposed method can be suitable to analyze the mechanisms of barefoot walking. © 2013 IEEE.

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Quantitative evaluation of the influence of dopaminergic neuron on flapping locomotion

K Azuma, H Takahashi, T Kan, J Tanimura, K Ito, K Matsumoto, ...

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems … （Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)）     5 - 8 2013年

ISSN  10846999

　概要を見る

This paper reports on quantitative evaluation of influence of dopamine neurons on the flight locomotion of a fruit fly (Drosophila menanogaster). The aerodynamic force was measured by MEMS triaxial forcesensor. We compared the aerodynamic force of the genetically modified flies whose dopamine neurons (DDCII) are functionally blocked with that of the wild type ones. The peak aerodynamic force generated by wild type flies was controlled smoothly. By contrast, the peak aerodynamic force generated by genetically modified flies showed rough fluctuation. The Peak variability of the wild type flies and genetically modified flies were 0.06 ± 0.04 and 0.18 ± 0.14 [-] (Average ± S.D.), respectively. The result indicated that the DDCII-expressing dopamine neurons were necessary to control their flapping flight. © 2013 IEEE.

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High sensitive 3D tactile sensor with the structure of elastic pyramids on piezoresistive cantilevers

N Thanh-Vinh, N Binh-Khiem, K Matsumoto, I Shimoyama

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems … 2013年

Measurement of an airflow velocity change using a cantilever with Pb(Zr, Ti)O3

Y Tomimatsu, H Takahashi, K Kuwana, T Kobayashi, K Matsumoto, ...

2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS … 2013年

AlN cantilever for differential pressure sensor

Y Tomimatsu, H Takahashi, T Kobayashi, K Matsumoto, I Shimoyama, ...

2013 Joint IEEE International Symposium on Applications of Ferroelectric and … （IEEE）     336 - 339 2013年

　概要を見る

The differential pressure sensors are used for various applications. In this work, a piezoelectric differential pressure sensor using an aluminum nitride (AIN) thin film cantilever is proposed to achieve high sensitivity and low power consumption. The dimensions of the cantilever are 1500 mu m x 1000 mu m x 2 mu m. The proposed sensor needs no power consumption in the AIN sensing element in principle. The sensor design was validated by measuring the performance of the sensor, which showed sensitivity of 8.2 mV/Pa from -20 Pa to 20 Pa

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Effectiveness of bristled wing of thrips

K Sato, H Takahashi, N Minh-Dung, K Matsumoto, I Shimoyama

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems … （IEEE）     21 - 24 2013年

ISSN  1084-6999

　概要を見る

We have investigated the mechanism of a bristled wing of thrips by using an artificial cantilever-based wing. Five kinds of the artificial bristled wing, which had the similar size of the thrips wing, with a different hair gap were evaluated in a wind tunnel. Experiment results suggested that at low hair-gap-based Reynolds number (<10), the bristled areas of the wing acted as an imaginary airflow block, which increased the aerodynamic force. Meanwhile, this phenomenon did not occur at high Reynolds number (>100).

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Differential pressure distribution measurement for the development of insect-sized wings

H Takahashi, K Matsumoto, I Shimoyama

Measurement Science and Technology 24 (5), 055304 （IOP PUBLISHING LTD）  24 （ 5 ） 055304 2013年

研究論文（学術雑誌）, 共著, 査読有り,  ISSN  0957-0233

　概要を見る

This paper reports on the measurement of the differential pressure distribution over a flat, thin wing using a micro-electro-mechanical systems sensor. Sensors featuring a piezoresistive cantilever were attached to a polyimide/Cu wing. Because the weight of the cantilever element was less than 10 ng, the sensor can measure the differential pressure without interference from inertial forces, such as wing flapping motions. The dimensions of the sensor chips and the wing were 1.0 mm x 1.0 mm x 0.3 mm and 100 mm x 30 mm x 1 mm, respectively. The differential pressure distribution along the wing's chord direction was measured in a wind tunnel at an air velocity of 4.0 m s(-1) by changing the angle of attack. It was confirmed that the pressure coefficient calculated by the measured differential pressure distribution was similar to the value measured by a load cell.

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Design of a piezoresistive triaxial force sensor probe using the sidewall doping method

T Kan, H Takahashi, N Binh-Khiem, Y Aoyama, Y Takei, K Noda, ...

Journal of Micromechanics and Microengineering 23 (3), 035027 （IOP PUBLISHING LTD）  23 （ 3 ） 035027 2013年

研究論文（学術雑誌）, 共著, 査読有り,  ISSN  0960-1317

　概要を見る

In this study, we propose a triaxial force measurement sensor probe with piezoresistors fabricated via sidewall doping using rapid thermal diffusion. The device was developed as a tool for measuring micronewton-level forces as vector quantities. The device consists of a 15 mu m thick cantilever, two sensing beams and four wiring beams. The length and width of the cantilever are 1240 mu m and 140 mu m, respectively, with a beam span of 1200 mu m and a width of 10-15 mu m. The piezoresistors are formed at the root of the cantilever and the sidewalls of the two sensing beams. The sensor spring constants for each axis were measured at k(x) = 1.5 N m(-1), k(y) = 3.5 N m(-1) and k(z) = 0.64 N m(-1). We confirmed that our device was capable of measuring triaxial forces with a minimum detectable force at the submicronewton level.

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An AlN cantilever for a wake-up switch triggered by air pressure change

Y Kaiho, H Takahashi, Y Tomimatsu, T Kobayashi, K Matsumoto, ...

Journal of Physics: Conference Series 476 (1), 012122 （IOP PUBLISHING LTD）  476 2013年

ISSN  1742-6588

　概要を見る

This research reports an AlN cantilever with an air chamber for a wake-up switch triggered by air pressure change. The proposed sensor is designed to fulfil both high sensitivity and low power consumption. By combining an air chamber to the one side of the AlN cantilever surface, the barometric pressure change generates a piezoelectric voltage. Thus, a wake-up switch triggered by air pressure change can be achieved using an AlN cantilever. The size of the fabricated AlN cantilever was 2000 mu m x 1000 mu m x 2 mu m. The sensitivity to static differential pressure was 11.5 mV/Pa at the range of -20 Pa to 20 Pa. We evaluated the response of the sensor, which was composed of the AlN cantilever and the chamber of 60 ml in volume, when air pressure change was applied. The output voltage increased with increasing the applied air pressure change. It was observed that the maximum output voltage of 50 mV was generated when the air pressure change was 13 Pa.

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MEMS microphone with a micro Helmholtz resonator

H Takahashi, A Suzuki, E Iwase, K Matsumoto, I Shimoyama

Journal of Micromechanics and Microengineering 22 (8), 085019 （IOP PUBLISHING LTD）  22 （ 8 ） 085019 2012年

研究論文（学術雑誌）, 共著, 査読有り,  ISSN  0960-1317

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This paper reports on the development of a micro electro mechanical system microphone consisting of a piezoresistive cantilever and a micro HR (Helmholtz resonator) for use as an ultrasonic proximity sensor. The resonance frequency of the HR was designed to be equal to that of the cantilever. Therefore, the HR increases the sensitivity of the microphone to ultrasonic waves. The dimensions of the fabricated HR and the cantilever are 1.2 mm x 1.2 mm x 0.6 mm and 130 mu m x 40 mu m x 0.3 mu m, respectively. At a resonance frequency of 22.6 kHz, the cantilever with the HR detected ultrasonic waves with 14 times greater sensitivity than that of the cantilever without the HR. We demonstrated that the fabricated sensor is capable of measuring distances between 0.5 and 6.0 m.

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A piezoelectric flow sensor for wake-up switch of wireless sensor network node

Y Tomimatsu, K Kuwana, T Kobayashi, T Itoh, R Maeda

2012 Second Workshop on Design, Control and Software Implementation for … 2012年

A piezoelectric cantilever with Helmholtz resonator for a sound-triggered wake-up switch

Y Tomimatsu, H Takahashi, T Kobayashi, K Matsumoto, I Shimoyama, ...

Proceedings of PowerMEMS, 295-298 2012年

Triaxial force sensor with strain concentration notch beam for measurement of insect flight force

K Azuma, H Takahashi, T Kan, K Matsumoto, I Shimoyama

2012 IEEE 25th International Conference on Micro Electro Mechanical Systems … （IEEE）     140 - 143 2012年

ISSN  1084-6999

　概要を見る

This paper reports on the triaxial force measurement during flapping flight of a fruit fly (Drosophila melanogaster). The total flight force was measured by a triaxial force sensor. The sensor consists of a cantilever probe, two sensing beams and four wiring beams. The total size of the sensor was 2 mm x 3 mm x 0.5 mm. A fruit fly was attached to the tip of the cantilever probe. The triaxial forces were measured when the fruit fly flapped. The measured force varied in synchronization with the flapping frequency of 240 Hz. The maximum forces in both lift and thrust directions were approximately 40 mu N.

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