Taguchi, Yoshihiro

写真a

Affiliation

Faculty of Science and Technology, Department of System Design Engineering (Yagami)

Position

Professor

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Books 【 Display / hide 】

  • ナノ・マイクロスケール熱物性ハンドブック

    長坂雄次, 斎木敏治, 田口良広　他, 養賢堂, 2014

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Papers 【 Display / hide 】

  • Quadrant kirigami-type electrothermal MEMS actuator with multi-degree-of-freedom morphing capability

    Tsutsui T., Taguchi Y., Hashimoto M.

    Journal of Micromechanics and Microengineering 35 ( 2 )  2025.02

    ISSN  09601317

    　View Summary

    Kirigami design principles have been widely applied to develop thermally responsive shape-morphing devices across various scales. However, the multi-degree-of-freedom (multi-DoF) morphing capabilities of microelectromechanical-systems (MEMS)-scale kirigami devices under localized Joule heating remain largely unexplored. This paper presents a quadrant kirigami-type electrothermal MEMS actuator with multi-DoF morphing capabilities, demonstrating both one-dimensional piston motion and two-dimensional (2D) tilting motion. The actuator, fabricated using surface and bulk micromachining techniques, features four independent electrical circuits, creating four electrothermally separated quadrants within the MEMS-scale kirigami structure. The temperature distribution within each quadrant of the actuator, subjected to localized Joule heating, was experimentally examined using thermography, revealing distinct temperature contrasts. The actuator demonstrated multi-DoF morphing capabilities, achieving a 2D tilting angular displacement of approximately 10° at 70 mW and a vertical piston displacement of 1.5 mm at 135 mW. These experimental results validate that the electrothermal quadrant design, leveraging localized Joule heating, enhances the DoF morphing capabilities of kirigami-type electrothermal MEMS actuators.

  • Direct writing of graphitic carbon/polydimethylsiloxane bimorph thermal microactuator via two-photon polymerization and laser-induced graphitization

    Yu Yamashita, Yasuko Tanaka, Chen Tianzhou, Yoshihiro Taguchi, and Masaaki Hashimoto

    Mechanical Engineering Journal  2024

    Accepted

    　View Summary

    (Accepted)

  • 2光子マイクロ光造形とフェムト秒レーザアブレーションを用いた熱駆動ソフトマイクロアクチュエータ作製の基礎検討

    陳天州, 田口良広, 橋本将明

    熱物性  2024

    Accepted

  • Design of focus-tunable freeform microlens printed on kirigami MEMS actuator

    Matsuoka Y., Tsutsui T., Taguchi Y., Hahsimoto M.

    International Conference on Optical MEMS and Nanophotonics  2024

    ISSN  21605033

    　View Summary

    This study proposes the design of a focus-tunable freeform microlens printed on a MEMS actuator. The proposed freeform microlens, designed with its varying surface curvature along the azimuthal direction, can adjust its focal length through the tilt motion of the MEMS actuator. The designed freeform microlens was printed onto a glass substrate, and demonstrated focus tunability ranging from 0.31 mm to 3.72 mm.

  • Fabrication and characterization of VO<inf>2</inf> kirigami electrothermal MEMS actuator

    Tsutsui T., Taguchi Y., Hashimoto M.

    International Conference on Optical MEMS and Nanophotonics  2024

    ISSN  21605033

    　View Summary

    A kirigami electrothermal MEMS actuator using the phase transition material VO2 has been proposed. This paper reports the fabrication process and mechanical characteristics of the actuator. The actuator was fabricated by MEMS processes with VO2 annealing method. Through the environmental heating, the actuator exhibited the bi-directional actuation due to the thermal expansion and phase transition shrinkage of VO2, resulting in a net downward displacement of 219.5 μm.

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Papers, etc., Registered in KOARA 【 Display / hide 】

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Presentations 【 Display / hide 】

  • Design of focus-tunable freeform microlens printed on kirigami MEMS actuator

    Yuki Matsuoka, Taguchi Yoshihiro, Masaaki Hashimoto

    International Conference on Optical MEMS and Nanophotonics - OMN 2024 (San Sebastian) , 

    2024.07
    -
    2024.08
    , 

    Oral presentation (general)

  • Bimorph Thermal Microactuator Fabricated by Additive and Subtractive Femtosecond Laser Processing

    Tianzhou Chen, Yoshihiro Taguchi, Masaaki Hashimoto

    International Conference on Optical MEMS and Nanophotonics - OMN 2024 (San Sebastian) , 

    2024.07
    -
    2024.08
    , 

    Oral presentation (general)

  • Fabrication and characterization of VO2 kirigami electrothermal MEMS actuator

    Tomoya Tsutsui, Yoshihiro Taguchi, Masaaki Hashimoto

    International Conference on Optical MEMS and Nanophotonics - OMN 2024 (San Sebastian) , 

    2024.07
    -
    2024.08
    , 

    Oral presentation (general)

  • Fabrication of a Soft Photothermal Microactuator Using Two-photon Polymerization and Vacuum Filling

    Kiko Tanaka, Yoshihiro Taguchi, Masaaki Hashimoto

    International Conference on Optical MEMS and Nanophotonics - OMN 2024 (San Sebastian) , 

    2024.07
    -
    2024.08
    , 

    Oral presentation (general)

  • Study on Thermal Conductivity of Semiclathrate Hydrate by the Transient Hot-Wire Method

    Kento Doi, Yoshihiro Taguchi

    Twenty-Second Symposium on Thermophysical Properties 2024 (Boulder) , 

    2024.06
    , 

    Oral presentation (general)

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Research Projects of Competitive Funds, etc. 【 Display / hide 】

  • 極微量液滴内の分離・濃縮・混合・分析を実現する樹脂製マイクロ熱流体デバイスの創製

    2022.04
    -
    2025.03

    MEXT,JSPS, Grant-in-Aid for Scientific Research, 基盤研究(B), Principal investigator

  • モノリシック光電子ピンセットの創成とオンチップ分離濃縮・拡散センシングの実現

    2018.04
    -
    2022.03

    MEXT,JSPS, Grant-in-Aid for Scientific Research, Grant-in-Aid for Scientific Research (B), Principal investigator

  • Nanoscale Optical Thermometry using Near-field Optics for Thermal Control of Nanodevices

    2015.04
    -
    2018.03

    MEXT,JSPS, Grant-in-Aid for Scientific Research, Grant-in-Aid for Scientific Research (B), Principal investigator

  • Development of micro diffusion sensor using optical MEMS

    2015.04
    -
    2017.03

    MEXT,JSPS, Grant-in-Aid for Scientific Research, Grant-in-Aid for Challenging Exploratory Research, Principal investigator

    　View Summary

    The diffusion coefficients of biological molecules, such as proteins, reflect their size, molecular structure, conformational changes, and inter-molecular interactions. Therefore, how the diffusion coefficient of biological samples changes in liquid solution is essential knowledge for clinical diagnosis and drug discovery. In this study, novel techniques such as (1) the simple fabrication technique of hydrogenated amorphous silicon, (2) the optical sorting technique for the high sensitive measurement, and (3) the new channel structure applicable for the biological sample, have been developed.

  • 超高感度近接場光学熱顕微鏡による細胞表面蛋白質のナノスケール直接観察と構造制御

    2013

    Keio Gijuku Academic Development Funds, Commissioned ｒesearch, No Setting

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Intellectual Property Rights, etc. 【 Display / hide 】

  • 流量測定装置、流量測定方法および流量測定プログラム

    Date applied： 2016-24530   

    Patent, Joint

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Awards 【 Display / hide 】

  • 熱工学部門貢献表彰

    田口良広, 2024.10, 日本機械学会

  • 日本熱物性学会賞論文賞

    橋本将明，田口良広, 2021.10, 日本熱物性学会, ミリ長ストローク・低電力熱駆動切り紙MEMSアクチュエータの開発　－薄膜バイモルフの熱・機械応答特性－

  • ATPC2019 Best Paper Award

    Takuma Iwagi, Yoshihiro Taguchi, Yuji Nagasaka, 2019.10, Asian Thermophysical Properties Conference, Development of a Small Optical Rotation Measurement System Using a Hollow Motor with Half-wave-retader Plate with Multiple Probing Laser for Measurement of Dilute Glucose Aqueous Solution

  • 日本機械学会熱工学部門講演論文表彰

    鎌田慎, 山田幹, 田口良広, 長坂雄次, 2018.10, 日本機械学会熱工学部門, Development of Micro Fluidic System for High-speed Diffusion Measurement

  • 日本学術振興会科学研究費補助金審査員表彰

    2017.09, 日本学術振興会

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Courses Taught 【 Display / hide 】

  • THERMOFLUID DYNAMICS 1

    2025

  • SEMINAR IN SYSTEM DESIGN ENGINEERING

    2025

  • OPTICS SYSTEM

    2025

  • MICRODEVICE SYSTEM DESIGN

    2025

  • LABORATORIES IN SYSTEM DESIGN ENGINEERING 1)

    2025

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Memberships in Academic Societies 【 Display / hide 】

  • 日本機械学会, 

    2013
    -
    Present

  • （公社）日本伝熱学会, 

    2012
    -
    Present

  • 2012 International Conference on Solid State Devices and Materials, 

    2012
    -
    Present

  • ㈳日本伝熱学会, 

    2011
    -
    Present

  • ㈳日本伝熱学会, 

    2011
    -
    Present

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Committee Experiences 【 Display / hide 】

  • 2013
    -
    Present

    専門調査員, 文部科学省科学技術政策研究所

  • 2013
    -
    Present

    熱工学部門運営委員, 日本機械学会

  • 2013

    論文委員, 2013 International Conference on Solid State Devices and Materials

  • 2012
    -
    Present

    協議員, （公社）日本伝熱学会

  • 2012

    論文委員, 2012 International Conference on Solid State Devices and Materials

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