研究者詳細 - 柿沼　康弘

論文 - 柿沼　康弘

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電気粘着クラッチと力覚提示への応用

柿沼康弘，渡邊拡昭，青山藤詞郎，安齊秀伸

日本機械学会論文集C編 75 （ 755 ） 2009年

研究論文（学術雑誌）, 共著, 査読有り

Sensorless Cutting Force Monitoring using Parallel Disturbance Observer

D. Kurihara, Y. Kakinuma, S. Katsura

International Journal of Automation Technology 3 （ 4 ） 415-421 - 415 2009年

研究論文（学術雑誌）, 共著, 査読有り

Numerical and Experimental Analysis of Transient State Micro-bounce of Aerostatic Guideways Caused by Small Pores

T. Aoyama, K. Koizumi, Y. Kakinuma, Y. Kobayashi

CIRP Annals-Manufacturing Technology （TECHNISCHE RUNDSCHAU EDITION COLIBRI LTD） 58 （ 1 ） 367-370 - 370 2009年

研究論文（学術雑誌）, 共著, 査読有り, ISSN 0007-8506

Aerostatic guideways have been applied to precision machine elements. Recently, downsizing and the increased use of high-density technology in IT devices have generated demand for higher accuracy in aerostatic guideways. It has been pointed out that the micro-bounce occurs when the slider passes over the aerostatic guideway with small pores. This transient state micro-vibration decreases the accuracy of aerostatic guideways and, thus, it is now expected to be suppressed. The purpose of this study is to analyze the micro-bounce mechanism of aerostatic guideways caused by pores, and to propose new designs for the suppression of micro-bounce. (C) 2009 CIRP.

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展望　平成19年度の機能性流体分野の研究動向

青山藤詞郎，柿沼康弘

フルードパワーシステム学会誌緑陰特集号 39 （ E1 ） E19-E23 2008年

研究論文（学術雑誌）, 共著, 査読有り

Virtual Motor Control for the Machine Tools Table with 3 Linear Servo Motors

K.Umezawa, Y. Kakinuma, S. Katsura, K. Ohnishi, T. Aoyama, K. Yokoi

Journal of Advanced Mechanical Design, Systems, and Manufacturing 2 （ 4 ） 482-492 2008年

研究論文（学術雑誌）, 共著, 査読有り

Micro machining of Soft Polymer Material applying the Cryogenic Cooling

Y. Kakinuma, N. Yasuda, T. Aoyama

Journal of Advanced Mechanical Design, Systems, and Manufacturing （JAPAN SOC MECHANICAL ENGINEERS） 2 （ 4 ） 560-569 - 569 2008年

研究論文（学術雑誌）, 共著, 査読有り, ISSN 1881-3054

Polydimethylsiloxane (PDMS) is one of the important materials for microfluidic chips. The pattern of micro channels on the PDMS plate is usually fabricated through the photolithography and micro molding process. However, the photolithographic method requires multi chemical and mechanical processes and resultant long process time. The micro milling process is a feasible method for rapid fabrication of various patterns of micro channels. However, micromachining has not yet been applied to soft polymer materials. It is difficult to machine elastic materials such as PDMS because of their low toughness. In order to machine a micro grooves on soft polymer materials, the cutting process applying cryogenic cooling is proposed because the elastic properties of soft polymer materials remarkably change from rubbery state to glassy state below the glass transition temperature. In this study, the freezing milling method using liquid nitrogen is applied to the micro grooving of PDMS. The result of a cutting test shows that micro grooves can be shaped easily and machined accurately in PDMS by the proposed method.

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Development of Fixture element for Vacuum Transportation of Silicon Wafer using Electrorheological Gel

M. Tanaka, Y. Kakinuma, T. Aoayama, H.Anzai

Journal of Advanced Mechanical Design, Systems, and Manufacturing （JAPAN SOC MECHANICAL ENGINEERS） 2 （ 4 ） 762-772 - 772 2008年

研究論文（学術雑誌）, 共著, ISSN 1881-3054

Semiconductor process technology increasingly requires high accuracy and efficiency. In the case of processing thin fragile substrate such as silicon wafer, it has to be fixed with low strain. In addition, its fixture device can be used under vacuum condition because some processes are carried out in vacuum. It is required to develop a new fixture device for vacuum transportation of silicon wafer. ERG is the functional material whose friction characteristic varies according to the intensity of applied electric field. The surface friction of ERG can be changed quickly and reversibly applying the electric field. In other words, it becomes easy to fix and release a substrate by control of electric field. In this study, ERG is applied to a fixture element of silicon wafer available for vacuum process. The ERG fixture element was trial-manufactured and its performance under vacuum condition was evaluated experimentally. The result shows that the ERG effect emerges in vacuum and ERG can fix silicon wafer sufficiently. Moreover, numerical analysis of electric filed was carried out to obtain the optimal pattern of the one-sided electrodes used for the ERG fixture element. It is clear that the optimal width of electrodes exists according to the gap of electrodes and the thickness of ERG.

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Development of A New Fluid Supply System for Near Dry Machining Process

M. Yamashita, Y. Kakinuma, T. Aoyama, M. Aoki

Key Engineering Materials （TRANS TECH PUBLICATIONS LTD） 389-390 175-180 - + 2008年

研究論文（学術雑誌）, 共著, 査読有り, ISSN 1013-9826

Large amount of cutting oil consumption is one of the issues for environment. The Minimum Quantity Lubrication (MQL) technique has been applied to the near-dry cutting process. However, MQL technique generates oil mist which is harmful to the working environment and the health of factory workers. In this study, a new lubrication system called Direct Oil Shot Lubrication System (DOS) was developed and applied to milling processes. The performances of DOS technique was evaluated by measuring the floating oil mist and carrying out the cutting tests. The amount of floating oil mist of DOS system was considerably reduced compared to the MQL. The behavior of small oil drops supplied from DOS nozzle to cutting edge was analyzed by means of a high speed video observation, and the optimum setting for DOS was obtained. The experimental result shows developed DOS system realized the smaller density of oil mist floating than the MQL technique while the DOS attained the almost same lubrication effect in milling process as the MQL technique.

ERゲルを用いた電場援用研磨法の開発

柿沼康弘，竹澤慎吾，青山藤詞郎，田中克敏，相良誠，安齊秀伸

砥粒加工学会誌 52 （ 12 ） 712-717 2008年

研究論文（学術雑誌）, 共著, 査読有り

Development of the Variable Friction Clutch Applying the Functional Medium

Y. Kakinuma, T. Aoyama, H. Anzai

Journal of Mechanical Engineering （ASSOC MECHANICAL ENGINEERS TECHNICIANS SLOVENIA） 53 （ 11/07 ） 755-770 - 770 2007年

研究論文（学術雑誌）, 単著, 査読有り, ISSN 0039-2480

A new functional material known as electro-rheological gel (ERG) that shows variable surface friction according to an applied electric field has been developed. It was expected that ERG could be applied to a machine element to transfer force such as a clutch, because the frictional force of an ERG surface can be controlled electrically. The one-sided patterned electrodes, which arrange anode and cathode alternately on the insulating base, are proposed in a recent study of electro-rheological fluid (ERF) to simplify the structure of the wiring. In this study, one-sided patterned electrodes are applied to an ERG, and the influence of the pattern of the one-sided electrode on the ERG effect is numerically and experimentally investigated. Based on the results of the electrode pattern evaluation, an ERG clutch element, using the one-sided electrodes with an optimum electrode pattern, is developed and the performance of the ERG clutch is experimentally evaluated. The ERG clutch shows excellent performance for static and dynamic characteristics in torque transfer, and an ERG clutch unit shows excellent performance for torque transfer The transferred torque changes widely and smoothly in response to the variation of the applied electric field. (c) 2007 Journal of Mechanical Engineering. All rights reserved.

Application of the Electro-rheological Gel to Fixture Devices for Micro Milling Processes

柿沼康弘

Journal of Advanced Mechanical Design, Systems, and Manufacturing of JSME （JAPAN SOC MECHANICAL ENGINEERS） 1 （ 3 ） 387-398 - 398 2007年

研究論文（学術雑誌）, 共著, 査読有り, ISSN 1881-3054

Electro-rheological gel (ERG) is a new functional material whose surface friction and adhesive properties vary according to the intensity of the applied electric field. In a recent study, one-sided patterned electrodes were applied to the ERG and the change in surface frictional and adhesive property under the electric field, which is called the ERG effect, was experimentally confirmed. The ERG with one-sided patterned electrodes is considered to be suitable for application to a fixture device for micro milling. In this study, a prototype of the ERG fixture device was developed and its performance was experimentally investigated. The proposed ERG fixture devices can be useful for fixturing both metallic and nonmetallic workpieces, such as glass. Micro shrinkage of the ERG occurs in proportion to the voltage applied to the ERG material. Using this characteristic, the alignment of the workpiece can be also adjusted. The developed ERG fixture device was applied to the micro grooving process of a thin glass workpiece, and successful results were obtained.

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工作機械用テーブルの仮想モータ制御

柿沼康弘

精密工学会誌 73 （ 1 ） 150-155 2007年

研究論文（学術雑誌）, 共著, 査読有り

ERゲルに対する片側構造電極の適用とその性能評価（第二報）

柿沼康弘

精密工学会誌 73 （ 7 ） 792-797 2007年

研究論文（学術雑誌）, 共著, 査読有り

ERゲルを適用した力伝達素子における片側電極の最適設計

柿沼康弘

日本機械学会論文集 73 （ 733 ） 192-199 2007年

研究論文（学術雑誌）, 共著, 査読有り

The influences of the material and geometrical properties of sliding plate on ER effect of Gel-structured ERF

S. Saito, Y. Kakinuma, T. Aoyama, K. Tanaka, H. Anzai

International Journal of Modern Physics B （WORLD SCIENTIFIC PUBL CO PTE LTD） 21 （ 28/29 ） 4751-4757 - 4757 2007年

研究論文（学術雑誌）, 単著, 査読有り, ISSN 0217-9792

Electro-rheological Fluid (ERF) is the functional fluid that can change its viscoelastic property by applying electric field. However, ERF shows the sedimentation of the ER particles in long time use, and it caused the unstable ER effect. The Gel-structured ERF (ERG) has been developed to solve this problem. When a metallic flat plate is placed on the ERG sheet, ERG shows the high shear force due to the occurrence of the contact between the gel and the plate in response to the applying electric field (ERG effect). ERG effect can be obtained not only for metallic materials but also non-metallic materials by applying the one-sided electrode, and the ER effect is supposed to be considerably influenced by the material and geometrical properties of flat plate on the ERG sheet. In this study, the influences of the material and geometrical properties of sliding plate are experimentally analyzed from the viewpoint of the relative permittivity, surface roughness and flatness, and the design instruction for the selection of materials and their geometrical issues are proposed.

Application of ER gel with Variable Friction Surface to the Clamp System of Aerostatic slider

柿沼康弘

Precision Engineering （ELSEVIER SCIENCE INC） 30 （ 3 ） 280-287 - 287 2006年

研究論文（学術雑誌）, 共著, 査読有り, ISSN 0141-6359

An electro-rheological fluid (ERF) is a functional fluid whose viscoelastic properties vary according to the intensity of the applied electric field. ERFs are mixtures of nonconductive silicone oil and inorganic/organic composite electro-rheological particles. The properties of ERFs have been exploited to control the performance of machine elements. ERFs have been applied to machine elements such as variable dampers and clutches. However, ERFs have disadvantages, namely the sedimentation of ER particles and the requirement of a seal mechanism. The sedimentation of ER particles reduces the ER effects and results in low stability of ER devices. In order to suppress the sedimentation, and thereby improve the performance of ERF devices, a new functional material called the gel-structured ERF (ERG) is developed, whose basic properties are analyzed in this study. The ER particles are suspended in the gel component, and thus will not precipitate out. This suppresses the decrease in the ER effect caused by precipitation. The ERG developed shows a large shear stress variation in response to the applied electric field. This high performance of ERG originates in a mechanism different from the ER effects of ERF. In order to elucidate the mechanism in ERG, the behavior of ER particles was observed under an electric field. The results show that the contact conditions at the interface between electrode and ERG change rapidly in response to the applied electric field, which result in a variation in shear force. On the basis of the results of a preliminary analysis, ERG was applied to the precision clamp system of an aerostatic slider, and its performance was assessed experimentally. (c) 2005 Elsevier Inc. All rights reserved.

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Basic Properties of Gel-structured Electro-rheological Fluids

柿沼康弘

International Journal of Modern Physics B （WORLD SCIENTIFIC PUBL CO PTE LTD） 19 （ 7-9 ） 1339-1345 - 1345 2005年

研究論文（学術雑誌）, 共著, 査読有り, ISSN 0217-9792

Electro-rheological fluids (ERFs) are composed of a functional fluid and colloidal suspension. Their rheological properties vary rapidly and reversibly with the applied electric field intensity. ERFs are mixtures of nonconductive silicone oil and inorganic/organic composite electro-rheological particles. Investigations into the properties of ERFs have led to remarkable advances in their performance in recent years. However, ERFs exhibit an undesirable property that obstructs the long-term use of ERF devices, namely the sedimentation and separation of ER particles from the silicone oil. The sedimentation of ER particles reduces the electro-rheological effect. In order to suppress the sedimentation and thereby improve the performance of ERF devices, a new functional material called Get Structured ERF (ERG) is developed and its basic properties are analyzed in this study. The ER particles are sustained in the gel component, and thus will not precipitate out. This suppresses the decrease in ER effect associated with precipitation. The developed ERG shows large shear stress variation in response to the applied electric field. This high performance of ERGs involves a different mechanism than that observed in ERFs. In order to elucidate the mechanism in ERGs, the behavior of ER particles was observed under an electric field. Conditions at the interface between the electrode and ERG were found to change rapidly in response to the applied electric field, resulting in the variation of shear force.

ERゲルにおけるせん断応力発生のメカニズム

柿沼康弘

フルードパワーシステム学会誌 36 （ 1 ） 15-21 2005年

研究論文（学術雑誌）, 共著, 査読有り

ERゲルに対する片側構造電極の適用とその性能評価(第一報)

柿沼康弘

精密工学会誌 71 （ 12 ） 1607-1612 2005年

研究論文（学術雑誌）, 共著, 査読有り

ゲル構造電気粘性流体の開発とその基本特性

柿沼康弘

精密工学会誌 70 （ 12 ） 1538-1543 2004年

研究論文（学術雑誌）, 共著, 査読有り

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